Global patent index - EP 0977903 A1

EP 0977903 A1 2000-02-09 - VACUUM DEPOSITION APPARATUS USING ELECTRON BEAMS

Title (en)

VACUUM DEPOSITION APPARATUS USING ELECTRON BEAMS

Title (de)

VAKUUMAUFDAMPFANLAGE MIT ELEKTRONENSTRAHLEN

Title (fr)

APPAREIL DE DEPOT SOUS VIDE A FAISCEAUX D'ELECTRONS

Publication

EP 0977903 A1 (EN)

Application

EP 99905319 A

Priority

  • JP 9900902 W
  • JP 4650398 A

Abstract (en)

[origin: WO9943864A1] The invention provides a vacuum deposition apparatus, which comprises a vacuum chamber (31), an electron beam source (32) coupled to said vacuum chamber, a holder (34) provided in the vacuum chamber for holding a substrate (36) on which a film is to be deposited, a target (38) of deposition materials being placed opposite to the substrate, said target having at least the same area as the substrate, and magnets (39) provided at the back of the target for generating magnetic fields near a surface of the target. The target opposite to the substrate has at least the same area as the substrate and the magnetic fields are generated near the surface of the target. The electrons emitted from the electron beam source are therefore diffused and uniformly distributed over the surface of the target. The electrons enter into the target, and the materials on the surface of the target are uniformly sputtered.

IPC 1-7 (main, further and additional classification)

C23C 14/30; H01J 37/317

IPC 8 full level (invention and additional information)

C23C 14/30 (2006.01); H01J 37/317 (2006.01)

CPC (invention and additional information)

C23C 14/30 (2013.01); H01J 37/3178 (2013.01)

Citation (search report)

See references of WO 9943864A1

Designated contracting state (EPC)

BE DE GB NL

EPO simple patent family

WO 9943864 A1 19990902; EP 0977903 A1 20000209; JP H11241158 A 19990907; TW 445302 B 20010711

INPADOC legal status

2002-03-13 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20010901

2001-09-05 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20010720

2000-04-26 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000228

2000-02-09 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): BE DE GB NL