EP 0979947 A2 20000216 - Turbomolecular pump
Title (en)
Turbomolecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbomoléculair
Publication
Application
Priority
JP 22792298 A 19980812
Abstract (en)
A turbomolecular pump is provided in which the structure of a stator blade (20) is improved for cooling rotor blades (2), thereby achieving a higher thermal conduction efficiency. The arrangement provides contact surfaces of the stator blades (20) and stator blade spacers (22) to be engaged/crushed upon assembling the pump. <IMAGE> <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/00 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP KR)
F04D 19/042 (2013.01 - EP); F04D 29/00 (2013.01 - KR); F04D 29/542 (2013.01 - EP); F04D 29/5853 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0979947 A2 20000216; EP 0979947 A3 20010328; JP 2000064986 A 20000303; KR 20000017282 A 20000325
DOCDB simple family (application)
EP 99306359 A 19990811; JP 22792298 A 19980812; KR 19990033123 A 19990812