Global Patent Index - EP 0980581 A1

EP 0980581 A1 2000-02-23 - BLUE AND ULTRAVIOLET PHOTOLITHOGRAPHY WITH ORGANIC LIGHT EMITTING DEVICES

Title (en)

BLUE AND ULTRAVIOLET PHOTOLITHOGRAPHY WITH ORGANIC LIGHT EMITTING DEVICES

Title (de)

PHOTOLITHOGRAPHIE IM BLAUEN UND UV-BEREICH MIT ORGANISCHEN LICHTQUELLEN

Title (fr)

PHOTOLITHOGRAPHIE EN BLEU ET EN ULTRAVIOLET REALISEE A L'AIDE DE DISPOSITIFS ILLUMINANTS ORGANIQUES

Publication

EP 0980581 A1 (EN)

Application

EP 99911196 A

Priority

  • US 9905008 W
  • US 7690898 P

Abstract (en)

[origin: WO9945558A1] A system and method of photolithography. The system of the present invention includes the use of an Organic Light Emitting Device ("OLED") as a light source for photolithography. A programmable matrix of OLEDs may be used to generate blue or ultraviolet light for patterning a layer of photosensitive material. The programmable OLED matrix may be either actively or passively driven.

IPC 1-7 (main, further and additional classification)

H01J 1/63; G03F 9/00

IPC 8 full level (invention and additional information)

G03F 7/20 (2006.01)

CPC (invention and additional information)

G03F 7/70391 (2013.01)

Citation (search report)

See references of WO 9945558A1

Designated contracting state (EPC)

DE FR GB IE IT

DOCDB simple family

WO 9945558 A1 19990910; EP 0980581 A1 20000223