EP 0980581 A1 20000223 - BLUE AND ULTRAVIOLET PHOTOLITHOGRAPHY WITH ORGANIC LIGHT EMITTING DEVICES
Title (en)
BLUE AND ULTRAVIOLET PHOTOLITHOGRAPHY WITH ORGANIC LIGHT EMITTING DEVICES
Title (de)
PHOTOLITHOGRAPHIE IM BLAUEN UND UV-BEREICH MIT ORGANISCHEN LICHTQUELLEN
Title (fr)
PHOTOLITHOGRAPHIE EN BLEU ET EN ULTRAVIOLET REALISEE A L'AIDE DE DISPOSITIFS ILLUMINANTS ORGANIQUES
Publication
Application
Priority
- US 9905008 W 19990305
- US 7690898 P 19980305
Abstract (en)
[origin: WO9945558A1] A system and method of photolithography. The system of the present invention includes the use of an Organic Light Emitting Device ("OLED") as a light source for photolithography. A programmable matrix of OLEDs may be used to generate blue or ultraviolet light for patterning a layer of photosensitive material. The programmable OLED matrix may be either actively or passively driven.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP)
G03F 7/70391 (2013.01)
Citation (search report)
See references of WO 9945558A1
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
DOCDB simple family (application)
US 9905008 W 19990305; EP 99911196 A 19990305