EP 0983208 A1 20000308 - MATERIAL WITH REDUCED OPTICAL ABSORPTION
Title (en)
MATERIAL WITH REDUCED OPTICAL ABSORPTION
Title (de)
ZUSAMMENSETZUNG MIT REDUZIERTER OPTISCHER ABSORPTION
Title (fr)
MATERIAU A ABSORPTION OPTIQUE REDUITE
Publication
Application
Priority
- EP 98925901 A 19980701
- EP 98103888 A 19980305
- IB 9801017 W 19980701
Abstract (en)
[origin: WO9944937A1] A new material is proposed which is created by replacing in SiON silicon atoms partially by atoms of a penta- or hexavalent element, or by incorporating mono- or divalent metals interstitially. The thereby introduced electron-donating element is attracted to the nitrogen site and stabilizes it in its two fold coordinated, and therefore negatively charged form. In this form, the hydrogen affinity of the nitrogen atoms is reduced if not completely eliminated. The achieved destabilization of hydrogen bound to nitrogen reduces the optical losses due to NH absorption.
IPC 1-7
IPC 8 full level
C01B 21/082 (2006.01); C01B 21/097 (2006.01); G02B 6/00 (2006.01); G02B 6/13 (2006.01); H01L 21/28 (2006.01); H01L 29/51 (2006.01); H01L 29/78 (2006.01); G02B 6/12 (2006.01)
CPC (source: EP)
C01B 21/082 (2013.01); C01B 21/097 (2013.01); G02B 6/13 (2013.01); H01L 21/28185 (2013.01); H01L 21/28202 (2013.01); H01L 29/518 (2013.01); C01P 2002/52 (2013.01); G02B 2006/12169 (2013.01)
Citation (search report)
See references of WO 9944937A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DOCDB simple family (application)
IB 9801017 W 19980701; EP 98925901 A 19980701