Global Patent Index - EP 0983208 A1

EP 0983208 A1 2000-03-08 - MATERIAL WITH REDUCED OPTICAL ABSORPTION

Title (en)

MATERIAL WITH REDUCED OPTICAL ABSORPTION

Title (de)

ZUSAMMENSETZUNG MIT REDUZIERTER OPTISCHER ABSORPTION

Title (fr)

MATERIAU A ABSORPTION OPTIQUE REDUITE

Publication

EP 0983208 A1 (EN)

Application

EP 98925901 A

Priority

  • EP 98925901 A
  • EP 98103888 A
  • IB 9801017 W

Abstract (en)

[origin: WO9944937A1] A new material is proposed which is created by replacing in SiON silicon atoms partially by atoms of a penta- or hexavalent element, or by incorporating mono- or divalent metals interstitially. The thereby introduced electron-donating element is attracted to the nitrogen site and stabilizes it in its two fold coordinated, and therefore negatively charged form. In this form, the hydrogen affinity of the nitrogen atoms is reduced if not completely eliminated. The achieved destabilization of hydrogen bound to nitrogen reduces the optical losses due to NH absorption.

IPC 1-7 (main, further and additional classification)

C01B 21/082; C01B 21/097; G02B 6/00; H01L 29/78

IPC 8 full level (invention and additional information)

C01B 21/082 (2006.01); C01B 21/097 (2006.01); G02B 6/00 (2006.01); G02B 6/13 (2006.01); H01L 21/28 (2006.01); H01L 29/51 (2006.01); H01L 29/78 (2006.01); G02B 6/12 (2006.01)

CPC (invention and additional information)

H01L 21/28185 (2013.01); C01B 21/082 (2013.01); C01B 21/097 (2013.01); G02B 6/13 (2013.01); H01L 21/28202 (2013.01); H01L 29/518 (2013.01); C01P 2002/52 (2013.01); G02B 2006/12169 (2013.01)

Citation (search report)

See references of WO 9944937A1

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

WO 9944937 A1 19990910; EP 0983208 A1 20000308

INPADOC legal status


2010-07-21 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20100202

2001-01-10 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20001127

2000-03-08 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 19991126

2000-03-08 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB