EP 0985828 B1 20050907 - Method and device to prevent deposits in a turbomolecular pump having magnetic or gas bearings
Title (en)
Method and device to prevent deposits in a turbomolecular pump having magnetic or gas bearings
Title (de)
Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder Gaslager
Title (fr)
Procédé et dispositif pour éviter les dépôts dans une pompe turbomoléculaire à palier magnétique ou gazeux
Publication
Application
Priority
FR 9811296 A 19980910
Abstract (en)
[origin: EP0985828A1] The deposition perturbation removal method is applied to a turbo-molecular pump having several stages (6,7,16-18;8-10,19) with magnetic paddles (13,14). The deposition perturbation is removed by injecting an active gas to a specific area which stirs up the generator molecules removing perturbations.
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/70 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US); F04D 29/70 (2013.01 - US); F04D 29/701 (2013.01 - EP); F05D 2260/607 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0985828 A1 20000315; EP 0985828 B1 20050907; AT E304123 T1 20050915; DE 69927101 D1 20051013; DE 69927101 T2 20060629; FR 2783883 A1 20000331; FR 2783883 B1 20001110; US 6224326 B1 20010501
DOCDB simple family (application)
EP 99402125 A 19990826; AT 99402125 T 19990826; DE 69927101 T 19990826; FR 9811296 A 19980910; US 39258699 A 19990909