Global patent index - EP 0987801 A2

EP 0987801 A2 2000-03-22 - Process of manufacturing an optoelectronic semiconductor device

Title (en)

Process of manufacturing an optoelectronic semiconductor device

Title (de)

Verfahren zur Herstellung eines optoelektronischen Bauelements

Title (fr)

Procédé de fabrication d'un composant semi-conducteur optoélectronique

Publication

EP 0987801 A2 (DE)

Application

EP 99118259 A

Priority

DE 19842038 A

Abstract (en)

Optoelectronic component production comprises position adjustment of lens coupling optics (9) while operating mounted laser chips (1). An optoelectronic component production process comprises: (a) providing a semiconductor wafer (2) with metallic structures (13) for electrically contacting and mechanically fixing laser chips (1) with beam paths parallel to the wafer; (b) positioning beam deflector lens coupling optics (9) on the wafer; (c) operating the laser chips and adjusting the spacing between the chip and the optics until the deflected laser light (11) provides a predetermined position of the optical image plane (15); and (d) fixing the optics in the adjusted position.

Abstract (de)

Bei einem Verfahren zur Herstellung eines optoelektronischen Bauelements wird ein Laserchip (1) auf einer mit metallischen Strukturen (13) versehenen Halbleiterscheibe (2) befestigt. Danach wird zu jedem Laserchip (1) eine den Strahlengang des Laserchips (1) umlenkende Linsenkoppeloptik (9) auf der Halbleiterscheibe (2) positioniert. Der Laserchip (1) wird betrieben und der Abstand zwischen dem Laserchip (1) und der Linsenkoppeloptik (9) wird so variiert und eingestellt, daß eine vorgegebene Strahlbedingung hinsichtlich der Lage der optischen Bildebene (15) erfüllt ist. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01S 5/02; G02B 6/42

IPC 8 full level (invention and additional information)

G02B 6/42 (2006.01); H01S 5/022 (2006.01)

CPC (invention and additional information)

G02B 6/422 (2013.01); G02B 6/4214 (2013.01); G02B 6/424 (2013.01); G02B 6/4244 (2013.01); G02B 6/4259 (2013.01); H01S 5/02248 (2013.01); G02B 6/4238 (2013.01); G02B 6/4273 (2013.01); G02B 6/4286 (2013.01); H01S 5/02284 (2013.01); H01S 5/02292 (2013.01); H01S 5/0683 (2013.01)

Designated contracting state (EPC)

DE FR GB IT NL

EPO simple patent family

EP 0987801 A2 20000322; EP 0987801 A3 20000607; EP 0987801 B1 20020731; JP 2000091688 A 20000331; JP 3486378 B2 20040113; US 6271049 B1 20010807

INPADOC legal status

2008-11-28 [PG25 GB] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: GB

- Ref Legal Event Code: PG25

- Free Format Text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

- Effective date: 20070914

2008-10-31 [PG25 FR] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: FR

- Ref Legal Event Code: PG25

- Free Format Text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

- Effective date: 20071001

2008-10-31 [PGFP GB] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: GB

- Ref Legal Event Code: PGFP

- Payment date: 20050905

- Year of fee payment: 7

2008-09-12 [REG FR ST] NOTIFICATION OF LAPSE

- Ref Legal Event Code: ST

- Effective date: 20080531

2008-07-31 [PG25 DE] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: DE

- Ref Legal Event Code: PG25

- Free Format Text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

- Effective date: 20080401

2008-05-28 [GBPC] GB: EUROPEAN PATENT CEASED THROUGH NON-PAYMENT OF RENEWAL FEE

- Ref Legal Event Code: GBPC

- Effective date: 20070914

2008-04-30 [PGFP FR] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: FR

- Ref Legal Event Code: PGFP

- Payment date: 20070111

- Year of fee payment: 8

2007-01-10 [PGFP DE] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: DE

- Ref Legal Event Code: PGFP

- Payment date: 20070110

- Year of fee payment: 8

2006-12-29 [PGFP GB] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: GB

- Ref Legal Event Code: PGFP

- Payment date: 20061229

- Year of fee payment: 8

2006-07-21 [REG FR TP] TRANSMISSION OF PROPERTY

- Ref Legal Event Code: TP

2005-08-23 [PGFP FR] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: FR

- Ref Legal Event Code: PGFP

- Payment date: 20050823

- Year of fee payment: 7

2003-07-23 [26N] NO OPPOSITION FILED

- Ref Legal Event Code: 26N

- Effective date: 20030506

2003-02-07 [ET] FR: TRANSLATION FILED

- Ref Legal Event Code: ET

2003-01-06 [NLV1] NL: LAPSED OR ANNULLED DUE TO FAILURE TO FULFILL THE REQUIREMENTS OF ART. 29P AND 29M OF THE PATENTS ACT

- Ref Legal Event Code: NLV1

2002-10-30 [GBT] GB: TRANSLATION OF EP PATENT FILED (GB SECTION 77(6)(A)/1977)

- Ref Legal Event Code: GBT

- Effective date: 20021004

2002-09-05 [REF] CORRESPONDS TO:

- Ref Legal Event Code: REF

- Ref Document Number: 59902175

- Country of Ref Document: DE

- Date of Ref Document: 2002-09-05

2002-07-31 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT NL

2002-07-31 [REG GB FG4D] EUROPEAN PATENT GRANTED

- Ref Legal Event Code: FG4D

- Free Format Text: NOT ENGLISH

2002-07-31 [PG25 IT] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: IT

- Ref Legal Event Code: PG25

- Free Format Text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20020731

2002-07-31 [PG25 NL] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: NL

- Ref Legal Event Code: PG25

- Free Format Text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20020731

2001-02-21 [AKX] PAYMENT OF DESIGNATION FEES

- Ref Legal Event Code: AKX

- Free Format Text: DE FR GB IT NL

2001-01-03 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: INFINEON TECHNOLOGIES AG

- Ref Legal Event Code: RAP1

2000-12-06 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20001018

2000-09-20 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000706

2000-06-07 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2000-06-07 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Free Format Text: AL;LT;LV;MK;RO;SI

2000-03-22 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT NL

2000-03-22 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Free Format Text: AL;LT;LV;MK;RO;SI