Global Patent Index - EP 0992095 A1

EP 0992095 A1 20000412 - A COMPACT DISCHARGE PUMPED SOFT X-RAY LASER

Title (en)

A COMPACT DISCHARGE PUMPED SOFT X-RAY LASER

Title (de)

EIN KOMPAKTER, ENTLADUNGSGEPUMPTER LASER FÜR WEICHE RÖNTGENSTRAHLUNG

Title (fr)

LASER COMPACT A RAYONS X MOUS POMPE PAR DECHARGE

Publication

EP 0992095 A1 20000412 (EN)

Application

EP 97928907 A 19970606

Priority

  • US 9709948 W 19970606
  • US 1933796 P 19960606

Abstract (en)

[origin: WO9747062A1] An extremely compact soft x-ray and/or extreme ultraviolet laser is disclosed that can be repetitively fired within short time intervals. The laser generates a plasma within a capillary (3) by flowing through the capillary (3) a fast high current pulse generated by a very compact liquid dielectric (1) transmission line (9) geometry.

IPC 1-7

H01S 3/30

IPC 8 full level

H01S 4/00 (2006.01)

CPC (source: EP)

H01S 4/00 (2013.01)

Citation (search report)

See references of WO 9747062A1

Designated contracting state (EPC)

DE FR GB IT

DOCDB simple family (publication)

WO 9747062 A1 19971211; AU 3305997 A 19980105; EP 0992095 A1 20000412

DOCDB simple family (application)

US 9709948 W 19970606; AU 3305997 A 19970606; EP 97928907 A 19970606