Global Patent Index - EP 0992095 A1

EP 0992095 A1 2000-04-12 - A COMPACT DISCHARGE PUMPED SOFT X-RAY LASER

Title (en)

A COMPACT DISCHARGE PUMPED SOFT X-RAY LASER

Title (de)

EIN KOMPAKTER, ENTLADUNGSGEPUMPTER LASER FÜR WEICHE RÖNTGENSTRAHLUNG

Title (fr)

LASER COMPACT A RAYONS X MOUS POMPE PAR DECHARGE

Publication

EP 0992095 A1 (EN)

Application

EP 97928907 A

Priority

  • US 9709948 W
  • US 1933796 P

Abstract (en)

[origin: WO9747062A1] An extremely compact soft x-ray and/or extreme ultraviolet laser is disclosed that can be repetitively fired within short time intervals. The laser generates a plasma within a capillary (3) by flowing through the capillary (3) a fast high current pulse generated by a very compact liquid dielectric (1) transmission line (9) geometry.

IPC 1-7 (main, further and additional classification)

H01S 3/30

IPC 8 full level (invention and additional information)

H01S 4/00 (2006.01)

CPC (invention and additional information)

H01S 4/00 (2013.01)

Citation (search report)

See references of WO 9747062A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 9747062 A1 19971211; AU 3305997 A 19980105; EP 0992095 A1 20000412

INPADOC legal status


2001-02-07 [18W] WITHDRAWN

- Date of withdrawal: 20001211

2000-04-12 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 19990106

2000-04-12 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT