Global Patent Index - EP 0995068 A1

EP 0995068 A1 2000-04-26 - METHOD FOR INFLUENCING THE OPERATION TEMPERATURE OF A BURNER AND BURNER FOR REALISING THIS METHOD

Title (en)

METHOD FOR INFLUENCING THE OPERATION TEMPERATURE OF A BURNER AND BURNER FOR REALISING THIS METHOD

Title (de)

VERFAHREN ZUR BEEINFLUSSUNG DER BETRIEBSTEMPERATUR EINES BRENNERS UND BRENNER HIERFÜR

Title (fr)

PROCEDE PERMETTANT D'INFLUER SUR LA TEMPERATURE DE FONCTIONNEMENT D'UN BRULEUR, ET BRULEUR POUR LA MISE EN OEUVRE DE CE PROCEDE

Publication

EP 0995068 A1 (DE)

Application

EP 98936413 A

Priority

  • DE 29712026 U
  • EP 9804205 W

Abstract (en)

[origin: TW487794B] Exhaust gases from production arrangements of semi-conductor contain toxic and/or condensable components and are cleansed through burning and afterwards washing of burned gas before it is suck off by vacuum pumps. On one side, the above-mentioned burner must be cooled here, and, on the other side, the cool surface trend to deposit solid condense from harmful materials and thus to cut down the storm cross-section in the burner and thus the sucking efficiency of the rear- connected vacuum pumps. In order to avoid this, the operation temperature of the burner is affected, and, for method, it is carried out through that the condensable surface areas of the burner (1) are heated by at least one of the gases, either lead to or produced in the burner, selected from the group consisting of exhaust gas, burning gas, oxidation gas, flame gas and purge gas and by heating these gas as heat-carrier on a temperature above the condensation temperature of the exhaust gas components; and, for arrangement, is carried out through that means for avoiding the condensation on the inner surfaces (8) of a feed opening (7) for the exhaust gas to the burner's flame is provided.

IPC 1-7 (main, further and additional classification)

F23G 7/06

IPC 8 full level (invention and additional information)

F23G 7/06 (2006.01)

CPC (invention and additional information)

F23G 7/065 (2013.01); F23G 2209/142 (2013.01)

Citation (search report)

See references of WO 9902921A1

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

DE 29712026 U1 19981112; EP 0995068 A1 20000426; TW 487794 B 20020521; WO 9902921 A1 19990121

INPADOC legal status


2002-09-25 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20020322

2000-10-25 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20000906

2000-04-26 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 19991214

2000-04-26 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB