EP 0995068 A1 20000426 - METHOD FOR INFLUENCING THE OPERATION TEMPERATURE OF A BURNER AND BURNER FOR REALISING THIS METHOD
Title (en)
METHOD FOR INFLUENCING THE OPERATION TEMPERATURE OF A BURNER AND BURNER FOR REALISING THIS METHOD
Title (de)
VERFAHREN ZUR BEEINFLUSSUNG DER BETRIEBSTEMPERATUR EINES BRENNERS UND BRENNER HIERFÜR
Title (fr)
PROCEDE PERMETTANT D'INFLUER SUR LA TEMPERATURE DE FONCTIONNEMENT D'UN BRULEUR, ET BRULEUR POUR LA MISE EN OEUVRE DE CE PROCEDE
Publication
Application
Priority
- DE 29712026 U 19970709
- EP 9804205 W 19980707
Abstract (en)
[origin: WO9902921A1] The gaseous effluents generated by manufacturing equipment in the semi-conductor industry contain toxic compounds and/or compounds that may be condensed. These gaseous effluents are purified by the consecutive combustion and scrubbing of the combustion gases and further aspirated using vacuum pumps. While a burner used therefor must be cooled, the cold surfaces tend to favour the deposition of solid condensates containing harmful substances, thus reducing the flow section in the burner as well as the suction power of the vacuum pumps which are mounted downstream. In order to prevent these problems, the method of this invention comprises influencing the operation temperature of the burner (1) by heating the surface regions of the burner (1) that may be subject to condensation at a temperature exceeding the condensation temperature of the gaseous effluent components. These surface regions are heated by heating at least one of the gases fed to the burner or produced by it and belonging to the group comprising the gaseous effluent, the combustion gases, the oxidation gases, the flame gases and the circulation gases, and by using said gas as a heat carrier. To this end, this method uses a device that comprises means for preventing condensation on the inner surface (8) of an opening (7) used for feeding the gaseous effluents to the flame of the burner.
IPC 1-7
IPC 8 full level
F23G 7/06 (2006.01)
CPC (source: EP)
F23G 7/065 (2013.01); F23G 2209/142 (2013.01)
Citation (search report)
See references of WO 9902921A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DE 29712026 U1 19981112; EP 0995068 A1 20000426; TW 487794 B 20020521; WO 9902921 A1 19990121
DOCDB simple family (application)
DE 29712026 U 19970709; EP 9804205 W 19980707; EP 98936413 A 19980707; TW 87111067 A 19980708