EP 0995144 A1 20000426 - ANAMORPHIC SCAN LENS FOR LASER SCANNER
Title (en)
ANAMORPHIC SCAN LENS FOR LASER SCANNER
Title (de)
ANAMORPHOTISCHE ABTASTLINSE FÜR LASERABTASTER
Title (fr)
OBJECTIF DE BALAYAGE ANAMORPHOSEUR POUR LECTEUR LASER
Publication
Application
Priority
- US 9812464 W 19980619
- US 5280097 P 19970708
- US 8243398 A 19980520
Abstract (en)
[origin: WO9903012A1] An anamorphic, catadioptric scan lens simultaneously corrects for distortion, polygon mirror wobble, and flat-field telecentric scanning of polychromatic laser light that is injected sagittally onto the polygon mirror. This system is also capable of imaging multiple beams and is corrected for differential distortion. The scan lens is incorporated in a photolithographic image scanner.
IPC 1-7
IPC 8 full level
G02B 17/08 (2006.01); G02B 26/10 (2006.01); G02B 26/12 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP KR)
G02B 26/12 (2013.01 - KR); G02B 26/125 (2013.01 - EP); G03F 7/704 (2013.01 - EP)
Citation (search report)
See references of WO 9903012A1
Designated contracting state (EPC)
DE GB NL SE
DOCDB simple family (publication)
WO 9903012 A1 19990121; CA 2296595 A1 19990121; EP 0995144 A1 20000426; IL 133751 A0 20010430; JP 2001509613 A 20010724; KR 20010014242 A 20010226; TW 394853 B 20000621
DOCDB simple family (application)
US 9812464 W 19980619; CA 2296595 A 19980619; EP 98930259 A 19980619; IL 13375198 A 19980619; JP 2000502439 A 19980619; KR 19997012346 A 19991227; TW 87111000 A 19980707