Global patent index - EP 0995215 A1

EP 0995215 A1 2000-04-26 - POWER CONTROL APPARATUS FOR AN ION SOURCE HAVING AN INDIRECTLY HEATED CATHODE

Title (en)

POWER CONTROL APPARATUS FOR AN ION SOURCE HAVING AN INDIRECTLY HEATED CATHODE

Title (de)

LEISTUNGSREGELVORRICHTUNG FÜR EINE IONENQUELLE MIT INDIREKT GEHEIZTER KATHODE

Title (fr)

APPAREIL DE COMMANDE DE PUISSANCE POUR SOURCE D'IONS POSSEDANT UNE CATHODE RECHAUFFEE INDIRECTEMENT

Publication

EP 0995215 A1 (EN)

Application

EP 98933797 A

Priority

  • GB 9802075 W
  • GB 9714990 A

Abstract (en)

[origin: GB2327513A] In a power control apparatus for controlling power supply of an ion source 10 having an indirectly heated cathode 12 the cathode bias power supply 15 which provides a bias potential between the filament 13 and cathode has an output that is effected by changes in impedance of the electron flow in the region between the filament and the cathode. Such impedance changes can arise due to changes in the chemistry of materials in this region, changes in gas pressure or physical changes, for example. A bias supply controller 32 in the power control apparatus maintains the output power of the cathode bias power supply unit at a desired level, thus not effected by changes in impedance of the electron flow between the filament and the indirectly heated cathode.

IPC 1-7 (main, further and additional classification)

H01J 27/08; H01J 37/08

IPC 8 full level (invention and additional information)

H01J 27/08 (2006.01); H01J 37/08 (2006.01); H01J 37/248 (2006.01)

CPC (invention and additional information)

H01J 27/08 (2013.01)

Citation (search report)

See references of WO 9904409A1

Designated contracting state (EPC)

AT DE FR GB

EPO simple patent family

GB 2327513 A 19990127; GB 2327513 B 20011024; GB 9714990 D0 19970924; EP 0995215 A1 20000426; JP 2001510928 A 20010807; JP 4054525 B2 20080227; WO 9904409 A1 19990128

INPADOC legal status

2010-07-28 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20100202

2009-05-27 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION):

- Ref Legal Event Code: RBV

- Designated State(s): AT DE FR GB

2007-10-17 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20070906

2000-04-26 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000117

2000-04-26 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB