Global Patent Index - EP 0995227 A4

EP 0995227 A4 2000-07-05 - A CONTROLLED CLEAVAGE PROCESS

Title (en)

A CONTROLLED CLEAVAGE PROCESS

Title (de)

KONTROLLIERTES SPALTUNGSVERFAHREN

Title (fr)

PROCEDE DE CLIVAGE CONTROLE

Publication

EP 0995227 A4 (EN)

Application

EP 98924756 A

Priority

  • US 9809567 W
  • US 4627697 P
  • US 2611598 A
  • US 2602798 A

Abstract (en)

[origin: WO9852216A1] A technique for forming a film of material (12) from a donor substrate (10). The technique has a step of introducing energetic particles (22) in a selected manner through a surface of a donor substrate (10) to a selected depth (20) underneath the surface, where the particles have a relatively high concentration to define a donor substrate material (12) above the selected depth and the particles for a pattern at the selected depth. An energy source such as pressurized fluid is directed to a selected region of the donor substrate to initiate a controlled cleaving action of the substrate (10) at the selected depth (20), whereupon the cleaving action provides an expanding cleave front to free the donor material from a remaining portion of the donor substrate.

IPC 1-7 (main, further and additional classification)

H01L 21/304; B26D 3/28; B26F 3/00; H01L 21/20; H01L 21/425; H01L 21/762

IPC 8 full level (invention and additional information)

H01L 21/265 (2006.01); B26D 3/28 (2006.01); B26F 3/00 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/304 (2006.01); H01L 21/425 (2006.01); H01L 21/762 (2006.01); H01L 27/12 (2006.01)

CPC (invention and additional information)

B26D 3/28 (2013.01); B26F 3/00 (2013.01); H01L 21/02 (2013.01); H01L 21/20 (2013.01); H01L 21/265 (2013.01); H01L 21/304 (2013.01); H01L 21/425 (2013.01); H01L 21/762 (2013.01); H01L 27/12 (2013.01)

Citation (search report)

Designated contracting state (EPC)

DE FR GB IE IT NL

EPO simple patent family

WO 9852216 A1 19981119; AU 7685198 A 19981208; CA 2290104 A1 19981119; CN 1146973 C 20040421; CN 1255237 A 20000531; EP 0995227 A1 20000426; EP 0995227 A4 20000705; JP 2001525991 A 20011211

INPADOC legal status


2015-05-13 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20141202

2007-10-24 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20070921

2000-07-05 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20000518

2000-07-05 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A4

- Designated State(s): DE FR GB IE IT NL

2000-07-05 [RIC1] CLASSIFICATION (CORRECTION)

- Free text: 7H 01L 21/304 A, 7H 01L 21/20 B, 7H 01L 21/762 B, 7B 26F 3/00 B, 7B 26D 3/28 B, 7H 01L 21/425 B

2000-04-26 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 19991210

2000-04-26 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IE IT NL