Global patent index - EP 0998758 A1

EP 0998758 A1 2000-05-10 - DRY-ETCHING OF INDIUM AND TIN OXIDES

Title (en)

DRY-ETCHING OF INDIUM AND TIN OXIDES

Title (de)

TROCKENÄTZEN VON INDIUM UND ZINNOXYDEN

Title (fr)

GRAVURE A SEC D'OXYDES D'INDIUM ET D'ETAIN

Publication

EP 0998758 A1 (EN)

Application

EP 98931554 A

Priority

  • US 9813139 W
  • US 88132397 A

Abstract (en)

[origin: WO9859379A1] An etch method includes providing a layer made of a material selected from the group consisting of an indium oxide (InO), a tin oxide (SnO), a mixture of indium and tin oxides, a compound of indium and of tin and of oxygen having the general formulation: InxSnyOz where z is substantially greater than zero but less than 100 % and where the sum x+y fills the remainder of the 100 %, and a mixture of the preceding ones of the group members. A reactive gas including hydrogen bromide (HBr) and hydrogen iodide (HI) is supplied to a vicinity of the material layer. Also, an electric field is supplied to react the supplied reactive gas with the material layer so as to form volatile byproducts of reactive gas and the material layer.

IPC 1-7 (main, further and additional classification)

H01L 31/18; H01L 21/3213

IPC 8 full level (invention and additional information)

H01L 21/302 (2006.01); H01L 21/3213 (2006.01)

CPC (invention and additional information)

H01L 21/32136 (2013.01)

Citation (search report)

See references of WO 9859379A1

Designated contracting state (EPC)

BE DE GB NL

EPO simple patent family

WO 9859379 A1 19981230; EP 0998758 A1 20000510; JP 2002506572 A 20020226

INPADOC legal status

2005-07-06 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20050103

2001-10-17 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: AKT, INC.

- Ref Legal Event Code: RAP1

2001-06-20 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: APPLIED KOMATSU TECHNOLOGY, INC.

- Ref Legal Event Code: RAP1

2000-05-10 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 19991227

2000-05-10 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): BE DE GB NL