EP 0999578 A2 20000510 - Sample processing system
Title (en)
Sample processing system
Title (de)
System zur Bearbeitung von Proben
Title (fr)
Système de traitement d'échantillons
Publication
Application
Priority
JP 31657598 A 19981106
Abstract (en)
This invention is to provide a processing system suitable for manufacturing an SOI substrate. A processing system (3000) includes a scalar robot (3150) for conveying a bonded substrate stack held by a robot hand (3152), and a centering apparatus (3070), separating apparatus (3020), inverting apparatus (3130), and cleaning/drying apparatus (3120) disposed at substantially equidistant positions from a driving shaft (3151) of the scalar robot (3150). When the robot hand (3152) is pivoted about the driving shaft (3151) in the horizontal plane and moved close to or away from the driving shaft (3151), a bonded substrate stack or separated substrate is conveyed among the processing apparatuses. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/306 (2006.01); H01L 21/677 (2006.01); H01L 27/12 (2006.01)
CPC (source: EP KR)
H01L 21/20 (2013.01 - KR); H01L 21/67092 (2013.01 - EP); H01L 21/67167 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 0999578 A2 20000510; EP 0999578 A3 20050413; CN 1160761 C 20040804; CN 1258091 A 20000628; JP 2000150610 A 20000530; JP 4343295 B2 20091014; KR 100444262 B1 20040811; KR 20000035284 A 20000626; TW 459299 B 20011011
DOCDB simple family (application)
EP 99308785 A 19991104; CN 99123433 A 19991105; JP 31657598 A 19981106; KR 19990049121 A 19991106; TW 88119172 A 19991103