Global patent index - EP 0999578 A2

EP 0999578 A2 2000-05-10 - Sample processing system

Title (en)

Sample processing system

Title (de)

System zur Bearbeitung von Proben

Title (fr)

Système de traitement d'échantillons

Publication

EP 0999578 A2 (EN)

Application

EP 99308785 A

Priority

JP 31657598 A

Abstract (en)

This invention is to provide a processing system suitable for manufacturing an SOI substrate. A processing system (3000) includes a scalar robot (3150) for conveying a bonded substrate stack held by a robot hand (3152), and a centering apparatus (3070), separating apparatus (3020), inverting apparatus (3130), and cleaning/drying apparatus (3120) disposed at substantially equidistant positions from a driving shaft (3151) of the scalar robot (3150). When the robot hand (3152) is pivoted about the driving shaft (3151) in the horizontal plane and moved close to or away from the driving shaft (3151), a bonded substrate stack or separated substrate is conveyed among the processing apparatuses. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01L 21/00; B25J 9/04; B26D 5/12; B32B 35/00; H01L 21/68

IPC 8 full level (invention and additional information)

H01L 21/677 (2006.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/306 (2006.01); H01L 27/12 (2006.01)

CPC (invention and additional information)

H01L 21/67167 (2013.01); H01L 21/67092 (2013.01)

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

EP 0999578 A2 20000510; EP 0999578 A3 20050413; CN 1160761 C 20040804; CN 1258091 A 20000628; JP 2000150610 A 20000530; JP 4343295 B2 20091014; KR 100444262 B1 20040811; KR 20000035284 A 20000626; TW 459299 B 20011011

INPADOC legal status

2006-05-03 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Effective date: 20060310

2006-01-04 [AKX] PAYMENT OF DESIGNATION FEES

- Ref Legal Event Code: AKX

- Designated State(s): DE FR GB IT

2005-10-26 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20050826

2005-04-13 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2005-04-13 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Extension state: AL LT LV MK RO SI

2005-03-30 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7H 01L 21/00 A

2005-03-30 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7H 01L 21/68 B

2005-03-30 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7B 25J 9/04 B

2005-03-30 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7B 32B 35/00 B

2005-03-30 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7B 26D 5/12 B

2005-01-05 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7H 01L 21/00 A

2005-01-05 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7H 01L 21/68 B

2005-01-05 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: 7B 25J 9/04 B

2000-05-10 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2000-05-10 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Free Format Text: AL;LT;LV;MK;RO;SI