EP 1000182 A2 20000517 - THIN FILMS
Title (en)
THIN FILMS
Title (de)
DÜNNE FILME
Title (fr)
FILMS MINCES
Publication
Application
Priority
- GB 9800556 W 19980223
- GB 9703616 A 19970221
Abstract (en)
[origin: WO9837254A2] The invention provides a thin film comprising successive layers of aluminium oxide, aluminium oxynitride and aluminium nitride, which varies sinusoidally throughout the depth of the film. The film can be used to coat and protect tools with sharp working edges, to provide a stress free thermal protective coating for natural or man-made diamonds, as a light filter and/or as a pigment. It is made by sputtering aluminium using a suitable noble gas in a variable atmosphere of oxygen and nitrogen at room temperature. The film is transparent and has a refractive index which varies between 1.6 to 2.2, again sinusoidally with depth.
IPC 1-7
IPC 8 full level
C23C 14/06 (2006.01); C23C 14/54 (2006.01); C23C 16/02 (2006.01); G02B 1/10 (2006.01)
CPC (source: EP US)
C23C 14/0676 (2013.01 - EP US); C23C 14/548 (2013.01 - EP US); C23C 16/0272 (2013.01 - EP); G02B 1/10 (2013.01 - EP); G02B 1/14 (2015.01 - US)
Citation (search report)
See references of WO 9837254A2
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9837254 A2 19980827; WO 9837254 A3 19981119; AU 6301198 A 19980909; EP 1000182 A2 20000517; GB 9703616 D0 19970409; ZA 981447 B 19980827
DOCDB simple family (application)
GB 9800556 W 19980223; AU 6301198 A 19980223; EP 98907020 A 19980223; GB 9703616 A 19970221; ZA 981447 A 19980220