Title (en)

METHOD FOR MAKING AN ELECTRON SOURCE WITH MICROTIPS, WITH SELF-ALIGNED FOCUSING GRID

Title (de)

VERFAHREN ZUR HERSTELLUNG EINER MIKROSPITZEN-ELEKTRONENQUELLE, MIT SELBSTJUSTIERTER FOKUSSIERELEKTRODE

Title (fr)

PROCEDE DE FABRICATION D'UNE SOURCE D'ELECTRONS A MICROPOINTES, A GRILLE DE FOCALISATION AUTO-ALIGNEE

Publication

EP 1000433 A1 20000517 (FR)

Application

EP 99920914 A 19990525

Priority

• FR 9901218 W 19990525
• FR 9806607 A 19980526

Abstract (en)

[origin: FR2779271A1] The invention concerns a method for making an electron source with microtips (67), with extraction grid and with focusing grid. Said method enables to align accurately the extraction grid (65) holes (61) with the focusing grid (66) openings using a single photolithography step, that which enables to produce the extraction grid holes. The invention is useful for producing a microtip electron source for flat display.

IPC 1-7

H01J 9/02

IPC 8 full level

H01J 3/02 (2006.01); H01J 9/02 (2006.01)

CPC (source: EP US)

H01J 3/022 (2013.01 - EP US); H01J 9/025 (2013.01 - EP US); H01J 2329/00 (2013.01 - EP US)

Designated contracting state (EPC)

DE GB IT

DOCDB simple family (publication)

FR 2779271 A1 19991203; FR 2779271 B1 20000707; DE 69909708 D1 20030828; DE 69909708 T2 20040415; EP 1000433 A1 20000517; EP 1000433 B1 20030723; JP 2002517065 A 20020611; US 6210246 B1 20010403; WO 9962093 A1 19991202

DOCDB simple family (application)

FR 9806607 A 19980526; DE 69909708 T 19990525; EP 99920914 A 19990525; FR 9901218 W 19990525; JP 2000551412 A 19990525; US 46338300 A 20000218