EP 1000434 A1 20000517 - METHOD FOR OBTAINING SELF-ALIGNED OPENINGS, IN PARTICULAR FOR MICROTIP FLAT DISPLAY FOCUSING ELECTRODE
Title (en)
METHOD FOR OBTAINING SELF-ALIGNED OPENINGS, IN PARTICULAR FOR MICROTIP FLAT DISPLAY FOCUSING ELECTRODE
Title (de)
VERFAHREN ZUR ERLANGUNG VON AUTOMATISCH AUSGERICHTETEN ÖFFNUNGEN, INSBESONDERE ZUR FOKUSSIERELEKTRODE FÜR EINEN FLACHEN MIKROSPITZEN-BILDSCHIRM
Title (fr)
METHODE D'OBTENTION D'OUVERTURES AUTO-ALIGNEES, EN PARTICULIER POUR ELECTRODE DE FOCALISATION POUR ECRAN PLAT A MICROPOINTES
Publication
Application
Priority
- FR 9901219 W 19990525
- FR 9806608 A 19980526
Abstract (en)
[origin: FR2779243A1] The invention concerns a method for producing a group of openings mutually positioned with accuracy on a structure and comprising, for example, a first opening produced in a first layer and a second opening produced in a second layer covering the first layer, the first opening being located inside the second opening. The method consists in: depositing on the first layer (41) a light-sensitive resin layer; etching said resin by photolithography, using a single mask, to leave on the first layer (41) a resin island (42) per group of openings, the resin island outer limit corresponding to the second opening, the resin island comprising an opening (43) corresponding to the first opening; vacuum depositing, on the first layer (41) and the remaining resin, a material (44) designed to constitute the second layer, said deposit being produced under a projection such that the first layer part (45) located at the resin island (42) opening (43) bottom is not covered by said deposit; etching the first layer (41) starting from the island (42) opening (43) to obtain the first opening (46) in the first layer; eliminating the remaining resin and the material covering it to obtain the second opening in the second layer.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01); G03F 7/40 (2006.01); H01J 9/02 (2006.01)
CPC (source: EP US)
H01J 9/025 (2013.01 - EP US); H01J 2329/00 (2013.01 - EP US)
Citation (search report)
See references of WO 9962094A1
Designated contracting state (EPC)
DE GB IT
DOCDB simple family (publication)
FR 2779243 A1 19991203; FR 2779243 B1 20000707; EP 1000434 A1 20000517; JP 2002517066 A 20020611; US 6276981 B1 20010821; WO 9962094 A1 19991202
DOCDB simple family (application)
FR 9806608 A 19980526; EP 99922224 A 19990525; FR 9901219 W 19990525; JP 2000551413 A 19990525; US 46344400 A 20000404