Global patent index - EP 1004136 A1

EP 1004136 A1 2000-05-31 - PLASMA PROCESSING APPARATUS

Title (en)

PLASMA PROCESSING APPARATUS

Title (de)

PLASMA-BEHANDLUNGSVORRICHTUNG

Title (fr)

APPAREIL DE TRAITEMENT PAR PLASMA

Publication

EP 1004136 A1 (EN)

Application

EP 99926627 A

Priority

  • GB 9901913 W
  • GB 9812852 A

Abstract (en)

[origin: WO9966531A1] There is disclosed a plasma processing apparatus comprising: a) a chamber having a plasma containing region, the chamber having a dielectric portion; b) an antenna (6) for coupling radio frequency (RF) power into the plasma; and c) a shield member (2) which reduces the level of RF power capacitively coupled into the plasma, wherein the shield member (2) comprises a conducting portion and is positioned between the plasma and the dielectric portion. Also disclosed is a shield member, particularly one for use in the described plasma processing apparatus.

IPC 1-7 (main, further and additional classification)

H01J 37/32

IPC 8 full level (invention and additional information)

H05H 1/46 (2006.01); B01J 19/08 (2006.01); C23C 14/34 (2006.01); C23F 4/00 (2006.01); H01J 37/32 (2006.01); H01L 21/205 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)

CPC (invention and additional information)

H01J 37/32504 (2013.01); H01J 37/321 (2013.01); H01J 37/32623 (2013.01)

Citation (search report)

See references of WO 9966531A1

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB IE IT LI NL SE

EPO simple patent family

WO 9966531 A1 19991223; EP 1004136 A1 20000531; GB 9812852 D0 19980812; JP 2002518165 A 20020625

INPADOC legal status

2004-01-07 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20030624

2003-04-02 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20030213

2001-08-16 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: SURFACE TECHNOLOGY SYSTEMS PLC

- Ref Legal Event Code: RAP1

2001-06-27 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: SURFACE TECHNOLOGY SYSTEMS PLC

- Ref Legal Event Code: RAP1

2000-08-09 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000614

2000-05-31 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH DE DK ES FI FR GB IE IT LI NL SE