EP 1007278 A1 20000614 - DEVICE AND METHOD FOR TREATING POLISHING PADS, ESPECIALLY POLISHING CLOTHS
Title (en)
DEVICE AND METHOD FOR TREATING POLISHING PADS, ESPECIALLY POLISHING CLOTHS
Title (de)
VORRICHTUNG UND VERFAHREN ZUM BEARBEITEN VON POLIERPADS, INSBESONDERE POLIERTÜCHERN
Title (fr)
PROCEDE ET DISPOSITIF POUR TRAITER DES TAMPONS DE POLISSAGE, NOTAMMENT DES TISSUS DE POLISSAGE
Publication
Application
Priority
- DE 9802486 W 19980824
- DE 19737873 A 19970829
Abstract (en)
[origin: WO9911431A1] The invention relates to a device and a method for treating a polishing pad, especially a polishing cloth for polishing wafers. The inventive device has a treatment disk which is mounted on a carrying device. Said treatment disk has a base layer on which diamond pieces set in metal are arranged, and is brought into contact with the polishing pad for treatment of the same by means of the carrying device. The invention also relates to a method for treating the polishing pads.
IPC 1-7
IPC 8 full level
B24B 37/04 (2006.01); B24B 45/00 (2006.01); B24B 53/00 (2006.01); B24B 53/017 (2012.01); B24B 53/12 (2006.01); B24D 9/08 (2006.01)
CPC (source: EP)
B24B 45/00 (2013.01); B24B 53/017 (2013.01); B24B 53/12 (2013.01); B24D 9/085 (2013.01)
Citation (search report)
See references of WO 9911431A1
Designated contracting state (EPC)
DE
DOCDB simple family (publication)
DOCDB simple family (application)
DE 9802486 W 19980824; EP 98949938 A 19980824