Global Patent Index - EP 1007278 A1

EP 1007278 A1 2000-06-14 - DEVICE AND METHOD FOR TREATING POLISHING PADS, ESPECIALLY POLISHING CLOTHS

Title (en)

DEVICE AND METHOD FOR TREATING POLISHING PADS, ESPECIALLY POLISHING CLOTHS

Title (de)

VORRICHTUNG UND VERFAHREN ZUM BEARBEITEN VON POLIERPADS, INSBESONDERE POLIERTÜCHERN

Title (fr)

PROCEDE ET DISPOSITIF POUR TRAITER DES TAMPONS DE POLISSAGE, NOTAMMENT DES TISSUS DE POLISSAGE

Publication

EP 1007278 A1 (DE)

Application

EP 98949938 A

Priority

  • DE 9802486 W
  • DE 19737873 A

Abstract (en)

[origin: WO9911431A1] The invention relates to a device and a method for treating a polishing pad, especially a polishing cloth for polishing wafers. The inventive device has a treatment disk which is mounted on a carrying device. Said treatment disk has a base layer on which diamond pieces set in metal are arranged, and is brought into contact with the polishing pad for treatment of the same by means of the carrying device. The invention also relates to a method for treating the polishing pads.

IPC 1-7 (main, further and additional classification)

B24B 37/04; B24B 45/00; B24B 53/00; B24B 53/12; B24D 9/08

IPC 8 full level (invention and additional information)

B24B 45/00 (2006.01); B24B 53/00 (2006.01); B24B 53/017 (2012.01); B24B 53/12 (2006.01); B24D 9/08 (2006.01)

CPC (invention and additional information)

B24B 53/017 (2013.01); B24B 45/00 (2013.01); B24B 53/12 (2013.01); B24D 9/085 (2013.01)

Citation (search report)

See references of WO 9911431A1

Designated contracting state (EPC)

DE

EPO simple patent family

WO 9911431 A1 19990311; EP 1007278 A1 20000614

INPADOC legal status


2001-10-17 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20010301

2000-06-14 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000218

2000-06-14 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE