Global Patent Index - EP 1007759 A1

EP 1007759 A1 2000-06-14 - MODULATED POWER FOR IONIZED METAL PLASMA DEPOSITION

Title (en)

MODULATED POWER FOR IONIZED METAL PLASMA DEPOSITION

Title (de)

PLASMA-GASPHASENABSCHEIDUNG MITTELS MODULIERTER SPULENZERSTÄUBUNGSLEISTUNG FÜR IIONISERTE METALLPLASMAABSCHEIDUNG

Title (fr)

MODULATION DE COURANT POUR DEPOT AU PLASMA DE METAL IONISE

Publication

EP 1007759 A1 (EN)

Application

EP 98939263 A

Priority

  • US 9816395 W
  • US 90834197 A
  • US 90834297 A

Abstract (en)

[origin: WO9907913A1] In a plasma deposition system for depositing a film of sputtered target material on a substrate, the output of an RF generator coupled to a coil for generating a plasma can be varied during the deposition process so that heating and sputtering of the RF coil can be more uniform by "time-averaging" RF voltage distributions along the RF coil. In another embodiment, RF energy applied to a coil positioned to sputter material onto a workpiece, is modulated to control the biasing of the coil. As a consequence, control of coil sputtering may be improved such that the uniformity of deposition may also be improved.

IPC 1-7 (main, further and additional classification)

C23C 14/40; H01J 37/32; H01J 37/34

IPC 8 full level (invention and additional information)

C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/40 (2006.01); H01J 27/16 (2006.01); H01J 37/08 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/203 (2006.01)

CPC (invention and additional information)

C23C 14/345 (2013.01); C23C 14/35 (2013.01); C23C 14/358 (2013.01); H01J 37/321 (2013.01); H01J 37/32174 (2013.01); H01J 37/34 (2013.01)

Citation (search report)

See references of WO 9907913A1

Designated contracting state (EPC)

DE GB NL

EPO simple patent family

WO 9907913 A1 19990218; EP 1007759 A1 20000614; EP 1128414 A1 20010829; JP 2001512887 A 20010828; TW 396384 B 20000701

INPADOC legal status


2002-12-11 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20020601

2000-11-08 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20000922

2000-06-14 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000126

2000-06-14 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE GB NL