EP 1008146 A1 20000614 - MICRO GAS RHEOSTAT
Title (en)
MICRO GAS RHEOSTAT
Title (de)
MIKRO-GAS RHEOSTAT
Title (fr)
RHEOSTAT A MICRO-GAZ
Publication
Application
Priority
- US 9709962 W 19970606
- US 65996596 A 19960607
Abstract (en)
[origin: WO9747013A1] A device and method for controlling small flows of gas for satellite orientation thrusters comprises a photoetched silicon body (10) etched to provide one or more particular flow paths, and optionally filters, wherein the flow path is defined by the silicon body (10) and a sealing glass layer (11) bonded thereto. Flow is controlled through the flow path(s) by heating the body (10) to decrease the gas flow.
IPC 1-7
IPC 8 full level
B64G 1/26 (2006.01); B64G 1/40 (2006.01); F02K 9/80 (2006.01); F03H 5/00 (2006.01); F03H 99/00 (2009.01); F15C 5/00 (2006.01); G01N 30/32 (2006.01); G05D 7/06 (2006.01)
CPC (source: EP)
B64G 1/26 (2013.01); B64G 1/402 (2013.01); F02K 9/805 (2013.01); F15C 5/00 (2013.01); B64G 1/401 (2013.01); F05D 2250/82 (2013.01); F05D 2250/84 (2013.01)
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9747013 A1 19971211; CA 2257341 A1 19971211; EP 1008146 A1 20000614; EP 1008146 A4 20000614; JP 2000512780 A 20000926
DOCDB simple family (application)
US 9709962 W 19970606; CA 2257341 A 19970606; EP 97929874 A 19970606; JP 50091398 A 19970606