Global patent index - EP 1008171 A1

EP 1008171 A1 2000-06-14 - METHOD FOR THERMAL SELF-HEALING OF AN SiC SEMICONDUCTOR AREA DOPED BY MEANS OF IMPLANTATION AND A SiC BASED SEMICONDUCTOR COMPONENT

Title (en)

METHOD FOR THERMAL SELF-HEALING OF AN SiC SEMICONDUCTOR AREA DOPED BY MEANS OF IMPLANTATION AND A SiC BASED SEMICONDUCTOR COMPONENT

Title (de)

VERFAHREN ZUM THERMISCHEN AUSHEILEN EINES DURCH IMPLANTATION DOTIERTEN SiC-HALBLEITERGEBIETES UND HALBLEITERBAUELEMENT AUF SiC-BASIS

Title (fr)

PROCEDE POUR L'AUTOREGENERATION THERMIQUE D'UNE REGION SEMICONDUCTRICE DE SiC DOPEE PAR IMPLANTATION ET COMPOSANT A SEMI-CONDUCTEURS A BASE DE SiC

Publication

EP 1008171 A1 (DE)

Application

EP 98949885 A

Priority

  • DE 9802348 W
  • DE 19736479 A

Abstract (en)

[origin: WO9910920A1] An SiC semiconductor area (4) doped by means of implantation is cooled from a given initial temperature of at least 1000 DEG C to a lower final temperature at a maximum cooling rate of 100 DEG C per minute. The semiconductor component contains a self-healed p-n junction (5) obtained according to said method and has a high blocking ability.

IPC 1-7 (main, further and additional classification)

H01L 21/265; H01L 21/324; H01L 29/78

IPC 8 full level (invention and additional information)

H01L 21/04 (2006.01); H01L 29/24 (2006.01)

CPC (invention and additional information)

H01L 29/1608 (2013.01); H01L 21/046 (2013.01); H01L 29/66068 (2013.01)

Citation (search report)

See references of WO 9910920A1

Designated contracting state (EPC)

DE FR IT

EPO simple patent family

WO 9910920 A1 19990304; CN 1267393 A 20000920; EP 1008171 A1 20000614

INPADOC legal status

2002-10-09 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20020301

2000-09-13 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: SICED ELECTRONICS DEVELOPMENT GMBH & CO. KG

- Ref Legal Event Code: RAP1

2000-06-14 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000218

2000-06-14 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR IT