EP 1009589 A1 20000621 - CHEMICALS SUPPLY SYSTEM AND ITS USE
Title (en)
CHEMICALS SUPPLY SYSTEM AND ITS USE
Title (de)
VERSORGUNGSSYSTEM FÜR CHEMIKALIEN UND DESSEN VERWENDUNG
Title (fr)
SYSTEME D'ALIMENTATION EN SUBSTANCES CHIMIQUES ET SON UTILISATION
Publication
Application
Priority
- DE 19715974 A 19970417
- EP 9802035 W 19980408
Abstract (en)
[origin: DE19715974A1] A new chemicals supply system allows solid-containing suspensions, useful for example for polishing wafers or in the semiconductor manufacture, to be prepared directly at their utilisation site.
IPC 1-7
IPC 8 full level
B24B 37/04 (2012.01); B24B 57/02 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP)
B24B 37/04 (2013.01); B24B 57/02 (2013.01)
Designated contracting state (EPC)
AT BE CH DE FR GB IE IT LI NL
DOCDB simple family (publication)
WO 9847661 A1 19981029; AT E251969 T1 20031115; DE 19715974 A1 19981022; DE 59809935 D1 20031120; EP 1009589 A1 20000621; EP 1009589 B1 20031015; JP 2001520589 A 20011030; TW 392248 B 20000601
DOCDB simple family (application)
EP 9802035 W 19980408; AT 98922664 T 19980408; DE 19715974 A 19970417; DE 59809935 T 19980408; EP 98922664 A 19980408; JP 54493098 A 19980408; TW 87105568 A 19980413