EP 1010194 A1 20000621 - VACUUM SPUTTERING APPARATUS
Title (en)
VACUUM SPUTTERING APPARATUS
Title (de)
VACUUMZERSTÄUBUNGSGERÄT
Title (fr)
DISPOSITIF DE PULVERISATION SOUS VIDE
Publication
Application
Priority
- GB 9802642 W 19980903
- GB 9718947 A 19970905
Abstract (en)
[origin: WO9913491A1] A vacuum sputtering apparatus (1) is described in which a target (7) having a target face (8) is mounted in a vacuum chamber (2) opposite a substrate (15). A magnetic pole plate (16) having a non-magnetic carrier plate (17) attached thereto is mounted behind the target (7) on a shaft (28) and can be rotated by means of a motor (29) about an axis substantially orthogonal to the target face (8). Carrier plate (17) has an array of holes (19) each of which can receive a corresponding first bar magnet (20, 21). There are fewer magnets (20, 21) than there are holes (19) and the magnets (20, 21) are removable from their holes (19). Carrier plate (17) also has a circumferential line of holes (22), in each of which may be mounted a corresponding second bar magnet (23). By varying the number and positions of the bar magnets (20, 21, 23) in the holes (19, 22) a variety of different high density plasma zone shapes (24; 25, 26; 27; 28) can be produced upon the target face (8). Conveniently, the bar magnets (20, 21, 23) are round in section but can alternatively be of square or hexagonal section, if desired.
IPC 1-7
IPC 8 full level
C23C 14/35 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP US)
H01J 37/3408 (2013.01 - EP US); H01J 37/3452 (2013.01 - EP US); H01J 37/3455 (2013.01 - EP US)
Designated contracting state (EPC)
BE CH DE DK FR GB IT LI NL SE
DOCDB simple family (publication)
WO 9913491 A1 19990318; DE 69828699 D1 20050224; DE 69828699 T2 20060427; EP 1010194 A1 20000621; EP 1010194 B1 20050119; GB 9718947 D0 19971112; JP 2001515966 A 20010925; JP 4306958 B2 20090805; US 6132576 A 20001017
DOCDB simple family (application)
GB 9802642 W 19980903; DE 69828699 T 19980903; EP 98940464 A 19980903; GB 9718947 A 19970905; JP 2000511181 A 19980903; US 46231800 A 20000105