EP 1011919 A1 20000628 - METHOD OF MANUFACTURING A POLISHING PAD
Title (en)
METHOD OF MANUFACTURING A POLISHING PAD
Title (de)
VERFAHREN ZUM HERSTELLEN VON EINEM POLIERKISSEN
Title (fr)
PROCEDE DE FABRICATION D'UN TAMPON DE POLISSAGE
Publication
Application
Priority
- US 9816289 W 19980805
- US 5490697 P 19970806
Abstract (en)
[origin: WO9907515A1] Polishing pads are provided having a polishing surface formed from a hydrophilic material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
IPC 1-7
IPC 8 full level
B24B 37/24 (2012.01); B24D 3/26 (2006.01); B24D 13/12 (2006.01); B24D 13/14 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B24B 37/24 (2013.01 - EP KR); B24B 37/26 (2013.01 - KR); B24D 3/26 (2013.01 - EP); B24D 3/28 (2013.01 - KR)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 9907515 A1 19990218; CN 1265618 A 20000906; DE 69827147 D1 20041125; DE 69827147 T2 20060302; EP 1011919 A1 20000628; EP 1011919 A4 20001102; EP 1011919 B1 20041020; JP 2001513450 A 20010904; KR 100499601 B1 20050707; KR 20010022571 A 20010326
DOCDB simple family (application)
US 9816289 W 19980805; CN 98807897 A 19980805; DE 69827147 T 19980805; EP 98938386 A 19980805; JP 2000507086 A 19980805; KR 20007001162 A 20000203