Global Patent Index - EP 1011919 A1

EP 1011919 A1 2000-06-28 - METHOD OF MANUFACTURING A POLISHING PAD

Title (en)

METHOD OF MANUFACTURING A POLISHING PAD

Title (de)

VERFAHREN ZUM HERSTELLEN VON EINEM POLIERKISSEN

Title (fr)

PROCEDE DE FABRICATION D'UN TAMPON DE POLISSAGE

Publication

EP 1011919 A1 (EN)

Application

EP 98938386 A

Priority

  • US 9816289 W
  • US 5490697 P

Abstract (en)

[origin: WO9907515A1] Polishing pads are provided having a polishing surface formed from a hydrophilic material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.

IPC 1-7 (main, further and additional classification)

B24B 1/00; B24B 7/19; B24B 7/30

IPC 8 full level (invention and additional information)

B24B 37/24 (2012.01); B24D 3/26 (2006.01); B24D 13/12 (2006.01); B24D 13/14 (2006.01); H01L 21/304 (2006.01)

CPC (invention and additional information)

B24B 37/24 (2013.01); B24D 3/26 (2013.01)

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 9907515 A1 19990218; CN 1265618 A 20000906; DE 69827147 D1 20041125; DE 69827147 T2 20060302; EP 1011919 A1 20000628; EP 1011919 A4 20001102; EP 1011919 B1 20041020; JP 2001513450 A 20010904

INPADOC legal status


2016-11-30 [PGFP FR] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

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2006-04-26 [GBPC] GB: EUROPEAN PATENT CEASED THROUGH NON-PAYMENT OF RENEWAL FEE

- Effective date: 20050805

2005-10-12 [26N] NO OPPOSITION FILED

- Effective date: 20050721

2005-09-09 [ET] FR: TRANSLATION FILED

2005-08-05 [PG25 GB] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

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- Free text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

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2005-08-05 [PG25 IT] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

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- Free text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

- Effective date: 20050805

2004-12-29 [RAP2] TRANSFER OF RIGHTS OF AN EP GRANTED PATENT

- Owner name: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, I

2004-11-25 [REF] CORRESPONDS TO:

- Document: DE 69827147 P 20041125

2004-10-20 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: B1

- Designated State(s): DE FR GB IT

2004-10-20 [REG GB FG4D] EUROPEAN PATENT GRANTED

2003-08-06 [RTI1] TITLE (CORRECTION)

- Free text: METHOD OF MANUFACTURING A POLISHING PAD

2003-02-26 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20030114

2000-11-02 [A4] DESPATCH OF SUPPLEMENTARY SEARCH REPORT

- Effective date: 20000914

2000-11-02 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A4

- Designated State(s): DE FR GB IT

2000-06-28 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000223

2000-06-28 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT