EP 1011919 A4 20001102 - IMPROVED POLISHING PADS AND METHODS RELATING THERETO
Title (en)
IMPROVED POLISHING PADS AND METHODS RELATING THERETO
Title (de)
VERBESSERTE POLIERKISSEN UND DARAUF BEZOGENE VERFAHREN
Title (fr)
TAMPONS DE POLISSAGE PERFECTIONNES ET PROCEDES ASSOCIES
Publication
Application
Priority
- US 9816289 W 19980805
- US 5490697 P 19970806
Abstract (en)
[origin: WO9907515A1] Polishing pads are provided having a polishing surface formed from a hydrophilic material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
IPC 1-7
IPC 8 full level
B24B 37/00 (2006.01); B24B 37/04 (2006.01); B24B 37/24 (2012.01); B24D 3/26 (2006.01); B24D 13/12 (2006.01); B24D 13/14 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B24B 37/24 (2013.01 - EP KR); B24B 37/26 (2013.01 - KR); B24D 3/26 (2013.01 - EP); B24D 3/28 (2013.01 - KR)
Citation (search report)
- [X] WO 9404599 A1 19940303 - RODEL INC [US]
- See references of WO 9907515A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 9907515 A1 19990218; CN 1265618 A 20000906; DE 69827147 D1 20041125; DE 69827147 T2 20060302; EP 1011919 A1 20000628; EP 1011919 A4 20001102; EP 1011919 B1 20041020; JP 2001513450 A 20010904; KR 100499601 B1 20050707; KR 20010022571 A 20010326
DOCDB simple family (application)
US 9816289 W 19980805; CN 98807897 A 19980805; DE 69827147 T 19980805; EP 98938386 A 19980805; JP 2000507086 A 19980805; KR 20007001162 A 20000203