EP 1012551 A1 20000628 - ULTRA-HIGH PURITY BOURDON TUBE PRESSURE GAUGE SYSTEM
Title (en)
ULTRA-HIGH PURITY BOURDON TUBE PRESSURE GAUGE SYSTEM
Title (de)
ULTRAHOCHREINES DRUCKWANDLERSYSTEM MIT EINEN BOURDONROHR
Title (fr)
SYSTEME ULTRA-PUR DE MANOMETRE A TUBE DE BOURDON
Publication
Application
Priority
- US 9814405 W 19980710
- US 5227197 P 19970711
- US 2273198 A 19980212
Abstract (en)
[origin: WO9902955A1] A reduced volume socket body (14) and a reduced volume tube (16) are used in a pressure gauge system in semiconductor fabrication process equipment. The socket body (14) includes an outlet and the tube (16) has an end (16a) connected to the outlet. The outlet is a shaped, weld prep (28) formed on the socket body (14) having an inner surface (22a). A continuous seat (32) is formed on the outlet and includes a seat thickness (S). The tube (16) has an inner wall (38) and an outer wall (36) defining a wall thickness (W) which is substantially the same as the seat thickness (S). The end (16a) of the tube (16) is engaged with the seat (32) so that the inner wall (38) of the tube and the inner surface (22a) of the outlet are substantially aligned to form a crevice free tube-to-socket connection.
IPC 1-7
IPC 8 full level
G01L 7/04 (2006.01)
CPC (source: EP)
G01L 7/041 (2013.01)
Designated contracting state (EPC)
DE FR GB IE
DOCDB simple family (publication)
WO 9902955 A1 19990121; AU 8569298 A 19990208; EP 1012551 A1 20000628; EP 1012551 A4 20040428
DOCDB simple family (application)
US 9814405 W 19980710; AU 8569298 A 19980710; EP 98936830 A 19980710