Global Patent Index - EP 1012571 A1

EP 1012571 A1 2000-06-28 - AN APPARATUS FOR ANALYZING THE CHARACTERISTICS OF A SEMICONDUCTOR WAFER AND METHOD OF OPERATING SAID APPARATUS

Title (en)

AN APPARATUS FOR ANALYZING THE CHARACTERISTICS OF A SEMICONDUCTOR WAFER AND METHOD OF OPERATING SAID APPARATUS

Title (de)

VORRICHTUNG ZUR ANALYSE DER EIGENSCHAFTEN EINES HALBLEITERWAFERS UND METHODE ZUR VERWENDUNG DER VORRICHTUNG

Title (fr)

DISPOSITIF PERMETTANT D'ANALYSER LES CARACTERISTIQUES D'UNE GALETTE DE SEMI-CONDUCTEUR ET METHODE D'UTILISATION DUDIT DISPOSITIF

Publication

EP 1012571 A1 (EN)

Application

EP 98926302 A

Priority

  • US 9811562 W
  • US 89069797 A
  • US 1583998 A

Abstract (en)

[origin: WO9902970A1] An optical measurement system is disclosed for evaluating samples with multi-layer thin film stacks. The optical measurement system includes a reference ellipsometer and one or more non-contact optical measurement devices. The reference ellipsometer is used to calibrate the other optical measurement devices. Once calibration is completed, the system can be used to analyse multi-layer thin film stacks. In particular, the reference ellipsometer provides a measurement which can be used to determine the total optical thickness of the stack. Using that information coupled with the measurements made by the other optical measurement devices, more accurate information about individual layers can be obtained.

IPC 1-7 (main, further and additional classification)

G01N 21/21; G01B 11/06

IPC 8 full level (invention and additional information)

G01B 11/06 (2006.01); G01N 21/21 (2006.01)

CPC (invention and additional information)

G01B 11/0641 (2013.01)

Citation (search report)

See references of WO 9902970A1

Designated contracting state (EPC)

DE ES FR GB IT NL SE

EPO simple patent family

WO 9902970 A1 19990121; EP 1012571 A1 20000628; JP 2003524748 A 20030819; JP 4231902 B2 20090304

INPADOC legal status


2006-03-08 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20050830

2005-04-20 [RTI1] TITLE (CORRECTION)

- Free text: AN APPARATUS FOR ANALYZING THE CHARACTERISTICS OF A SEMICONDUCTOR WAFER AND METHOD OF OPERATING SAID APPARATUS

2004-05-26 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20040416

2000-06-28 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000106

2000-06-28 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE ES FR GB IT NL SE