Global Patent Index - EP 1012584 A2

EP 1012584 A2 2000-06-28 - OBJECT INSPECTION AND/OR MODIFICATION SYSTEM AND METHOD

Title (en)

OBJECT INSPECTION AND/OR MODIFICATION SYSTEM AND METHOD

Title (de)

VORRICHTUNG ZUR KONTROLLIE UND/ODER VERÄNDERUNG VON GEGENSTÄNDEN.

Title (fr)

SYSTEME ET PROCEDE DE CONTROLE ET/OU DE MODIFICATION D'OBJETS

Publication

EP 1012584 A2 (EN)

Application

EP 98904705 A

Priority

  • US 9801528 W
  • US 78662397 A
  • US 82795397 A

Abstract (en)

[origin: WO9834092A2] A system and method for measuring, analysis, removal, addition or imaging of material using nanostructures in conjunction with mechanical, electromagnetic (optical) and electrical means. Techniques for fabricating such nanostructures and techniques for combining these elements in a system which can modify bulk or large area objects such as silicon wafers, and masks for lithography.

IPC 1-7 (main, further and additional classification)

G01N 23/00

IPC 8 full level (invention and additional information)

G01N 27/00 (2006.01); G01B 7/34 (2006.01); G01Q 10/00 (2010.01); G01Q 30/02 (2010.01); G01Q 30/16 (2010.01); G01Q 40/00 (2010.01); G01Q 40/02 (2010.01); G01Q 60/06 (2010.01); G01Q 60/10 (2010.01); G01Q 60/18 (2010.01); G01Q 60/24 (2010.01); G01Q 70/02 (2010.01); G01Q 70/08 (2010.01); G01Q 70/16 (2010.01); G01Q 80/00 (2010.01); G03F 1/00 (2012.01); G03F 7/20 (2006.01); G11B 5/23 (2006.01); G11B 5/31 (2006.01)

CPC (invention and additional information)

G01Q 70/16 (2013.01); G01Q 30/02 (2013.01); G01Q 30/16 (2013.01); G01Q 40/00 (2013.01); G01Q 40/02 (2013.01); G01Q 60/06 (2013.01); G01Q 70/02 (2013.01); G01Q 70/06 (2013.01); G03F 1/84 (2013.01); G03F 7/2049 (2013.01); G03F 7/704 (2013.01); G03F 7/70616 (2013.01); G01Q 80/00 (2013.01); G11B 5/232 (2013.01); G11B 5/3116 (2013.01); G11B 5/3163 (2013.01); G11B 5/3166 (2013.01)

Designated contracting state (EPC)

DE FR GB IT NL

EPO simple patent family

WO 9834092 A2 19980806; WO 9834092 A3 19981105; AU 6250898 A 19980825; EP 1012584 A2 20000628; EP 1012584 A4 20061004

INPADOC legal status


2011-02-09 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20100803

2007-05-23 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20070419

2006-10-04 [A4] SUPPLEMENTARY SEARCH REPORT

- Ref Legal Event Code: A4

- Effective date: 20060905

2006-10-04 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: G01N 27/00 20060101AFI20060830BHEP

2006-10-04 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: G01B 7/34 20060101ALI20060830BHEP

2006-10-04 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: G03F 1/00 20060101ALI20060830BHEP

2006-10-04 [RIC1] CLASSIFICATION (CORRECTION)

- Ref Legal Event Code: RIC1

- IPC: G03F 7/20 20060101ALI20060830BHEP

2000-06-28 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 19991108

2000-06-28 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT NL