Global patent index - EP 1012874 A1

EP 1012874 A1 2000-06-28 - DEVICE AND PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER

Title (en)

DEVICE AND PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER

Title (de)

VORRICHTUNG UND VERFAHREN ZUM BEHANDELN VON SUBSTRATEN IN EINEM FLUID-BEHÄLTER

Title (fr)

PROCEDE ET DISPOSITIF POUR TRAITER DES SUBSTRATS DANS UN RECIPIENT POUR FLUIDE

Publication

EP 1012874 A1 (DE)

Application

EP 97915438 A

Priority

  • DE 19615970 A
  • DE 19703646 A
  • EP 9701528 W

Abstract (en)

[origin: US6270585B1] A method and apparatus for handling substrates in a fluid container are provided. Even large substrates receive a particularly reliable support by means of at least one support strip that can be placed upon the upper edge portion of the substrates, and in particular in such a way that the support strip does not come into contact with treatment fluid in the tank.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/673 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01)

CPC (invention and additional information)

H01L 21/67057 (2013.01); Y10S 134/902 (2013.01)

Citation (search report)

See references of WO 9740522A1

Designated contracting state (EPC)

DE FR GB IT NL

EPO simple patent family

US 6270585 B1 20010807; EP 1012874 A1 20000628; JP 2000500926 A 20000125; TW 493213 B 20020701; WO 9740522 A1 19971030

INPADOC legal status

2004-01-02 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20030625

2003-03-19 [RTI1] TITLE (CORRECTION)

- Ref Legal Event Code: RTI1

- Free Format Text: PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER

2001-07-18 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20010601

2000-06-28 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 19981019

2000-06-28 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT NL