EP 1012874 A1 20000628 - DEVICE AND PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER
Title (en)
DEVICE AND PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER
Title (de)
VORRICHTUNG UND VERFAHREN ZUM BEHANDELN VON SUBSTRATEN IN EINEM FLUID-BEHÄLTER
Title (fr)
PROCEDE ET DISPOSITIF POUR TRAITER DES SUBSTRATS DANS UN RECIPIENT POUR FLUIDE
Publication
Application
Priority
- DE 19615970 A 19960422
- DE 19703646 A 19970131
- EP 9701528 W 19970326
Abstract (en)
[origin: US6270585B1] A method and apparatus for handling substrates in a fluid container are provided. Even large substrates receive a particularly reliable support by means of at least one support strip that can be placed upon the upper edge portion of the substrates, and in particular in such a way that the support strip does not come into contact with treatment fluid in the tank.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP US)
H01L 21/67057 (2013.01 - EP US); Y10S 134/902 (2013.01 - EP US)
Citation (search report)
See references of WO 9740522A1
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
US 6270585 B1 20010807; EP 1012874 A1 20000628; JP 2000500926 A 20000125; TW 493213 B 20020701; WO 9740522 A1 19971030
DOCDB simple family (application)
US 17176299 A 19990319; EP 9701528 W 19970326; EP 97915438 A 19970326; JP 53764997 A 19970326; TW 86104799 A 19970414