Global Patent Index - EP 1014198 A2

EP 1014198 A2 2000-06-28 - Projection lithography using a servo control

Title (en)

Projection lithography using a servo control

Title (de)

Projektionslithographie unter Verwendung einer Servosteuerung

Title (fr)

Lithographie par projection utilisant une servo-commande

Publication

EP 1014198 A2 (EN)

Application

EP 99310126 A

Priority

  • EP 99310126 A
  • EP 98204308 A

Abstract (en)

In a photolithography apparatus, accelerations of the lens unit due to vibrational disturbances are measured and used to derive a control signal which is applied to the positioning means of the wafer table and/or mask table, so as to effect compensating motions of that table. This feedforward system can be optimized to correct for motions of the lens unit in specific frequency bands, e.g. in the vicinity of the eigenfrequency of the lens. <IMAGE>

IPC 1-7 (main, further and additional classification)

G03F 7/20

IPC 8 full level (invention and additional information)

G03F 7/20 (2006.01)

CPC (invention and additional information)

G03F 7/70725 (2013.01); G03F 7/709 (2013.01)

Designated contracting state (EPC)

DE FR GB IT NL

EPO simple patent family

EP 1014198 A2 20000628; EP 1014198 A3 20021016

INPADOC legal status


2010-01-20 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20090702

2004-09-22 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: ASML NETHERLANDS B.V.

2003-07-23 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20030604

2003-07-09 [AKX] PAYMENT OF DESIGNATION FEES

- Designated State(s): DE FR GB IT NL

2003-06-18 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20030416

2002-10-16 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A3

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2002-10-16 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Free text: AL;LT;LV;MK;RO;SI

2002-08-21 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: ASML NETHERLANDS B.V.

2000-06-28 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2000-06-28 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Free text: AL;LT;LV;MK;RO;SI