EP 1015654 A1 20000705 - METHOD FOR COATING SUBSTRATES WITH ALUMINUM OXIDE (Al 2?O 3?) AND COATING A WORK PIECE USING SAID METHOD

Title (en)

METHOD FOR COATING SUBSTRATES WITH ALUMINUM OXIDE (Al 2?O 3?) AND COATING A WORK PIECE USING SAID METHOD

Title (de)

VERFAHREN ZUR BESCHICHTUNG VON SUBSTRATEN MIT ALUMINIUMOXID (Al 2?O 3?) UND DAMIT BESCHICHTETES WERKSTÜCK

Title (fr)

PROCEDE POUR REVETIR DES SUBSTRATS AVEC DE L'OXYDE D'ALUMINIUM (Al 2?O 3?) ET PIECE REVETUE SELON CE PROCEDE

Publication

EP 1015654 A1 20000705 (DE)

Application

EP 98951423 A 19980916

Priority

DE 19740729 A 19970916
DE 19830206 A 19980707
EP 9805909 W 19980916

Abstract (en)

[origin: WO9914393A1] The invention relates to a method for coating substrates with aluminum oxide (Al2O3) with at least a proportional crystalline phase of the aluminum oxide during which the substrates are coated by means of hollow cathode gas flux sputtering at temperatures greater than 400 DEG C and less than 1,000 DEG C.

IPC 1-7

C23C 14/08; C23C 14/34; C23C 14/22

IPC 8 full level

C23C 14/08 (2006.01); C23C 14/34 (2006.01)

CPC (source: EP)

C23C 14/081 (2013.01); C23C 14/3464 (2013.01)

Citation (search report)

See references of WO 9914393A1

Designated contracting state (EPC)

DE FR GB SE

DOCDB simple family (publication)

WO 9914393 A1 19990325; EP 1015654 A1 20000705

DOCDB simple family (application)

EP 9805909 W 19980916; EP 98951423 A 19980916