EP 1016120 A1 20000705 - RESISTIVE HEATING OF POWER COIL TO REDUCE TRANSIENT HEATING/START UP EFFECTS
Title (en)
RESISTIVE HEATING OF POWER COIL TO REDUCE TRANSIENT HEATING/START UP EFFECTS
Title (de)
WIDERSTANDHEIZUNG EINER LEISTUNGSSPULE UM TRANSIENTE HEIZUNG/STARTVORGANG EFFEKTE ZU VERMINDERN
Title (fr)
CHAUFFAGE PAR RESISTANCE D'UNE BOBINE DE PUISSANCE VISANT A REDUIRE LES EFFETS DU CHAUFFAGE/DEMARRAGE TRANSITOIRES
Publication
Application
Priority
- US 9819165 W 19980915
- US 93117097 A 19970916
Abstract (en)
[origin: WO9914790A1] A method and apparatus for preheating a coil used to generate a plasma field in a processing chamber in a semiconductor fabrication system. The coil is preheated in the chamber prior to sputter depositing material onto a substrate and workpiece. The coil is preheated to a predetermined temperature, which is preferably equal to or greater than the equilibrium temperature attained by the coil during sputter deposition processes. Preheating may be effected with a preheating current having a frequency lower than the minimum frequency required to ignite a plasma, or when the processing chamber contains an atmosphere which prevents formation of a plasma. The coil may preheated for a predetermined time period.
IPC 1-7
IPC 8 full level
C23C 14/40 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP KR US)
H01J 37/32 (2013.01 - KR); H01J 37/32009 (2013.01 - EP US); H01J 37/321 (2013.01 - EP US); H01J 37/32174 (2013.01 - EP US); H01J 37/34 (2013.01 - EP US); H01J 37/3402 (2013.01 - EP US); H01J 2237/022 (2013.01 - EP US)
Citation (search report)
See references of WO 9914790A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9914790 A1 19990325; EP 1016120 A1 20000705; JP 2001516949 A 20011002; KR 20010023947 A 20010326; TW 503262 B 20020921; US 6023038 A 20000208
DOCDB simple family (application)
US 9819165 W 19980915; EP 98948219 A 19980915; JP 2000512234 A 19980915; KR 20007002652 A 20000313; TW 87115271 A 19980914; US 93117097 A 19970916