Global Patent Index - EP 1016120 A1

EP 1016120 A1 2000-07-05 - RESISTIVE HEATING OF POWER COIL TO REDUCE TRANSIENT HEATING/START UP EFFECTS

Title (en)

RESISTIVE HEATING OF POWER COIL TO REDUCE TRANSIENT HEATING/START UP EFFECTS

Title (de)

WIDERSTANDHEIZUNG EINER LEISTUNGSSPULE UM TRANSIENTE HEIZUNG/STARTVORGANG EFFEKTE ZU VERMINDERN

Title (fr)

CHAUFFAGE PAR RESISTANCE D'UNE BOBINE DE PUISSANCE VISANT A REDUIRE LES EFFETS DU CHAUFFAGE/DEMARRAGE TRANSITOIRES

Publication

EP 1016120 A1 (EN)

Application

EP 98948219 A

Priority

  • US 9819165 W
  • US 93117097 A

Abstract (en)

[origin: WO9914790A1] A method and apparatus for preheating a coil used to generate a plasma field in a processing chamber in a semiconductor fabrication system. The coil is preheated in the chamber prior to sputter depositing material onto a substrate and workpiece. The coil is preheated to a predetermined temperature, which is preferably equal to or greater than the equilibrium temperature attained by the coil during sputter deposition processes. Preheating may be effected with a preheating current having a frequency lower than the minimum frequency required to ignite a plasma, or when the processing chamber contains an atmosphere which prevents formation of a plasma. The coil may preheated for a predetermined time period.

IPC 1-7 (main, further and additional classification)

H01J 37/32; H01J 37/34

IPC 8 full level (invention and additional information)

C23C 14/40 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)

CPC (invention and additional information)

H01J 37/32174 (2013.01); H01J 37/32009 (2013.01); H01J 37/321 (2013.01); H01J 37/34 (2013.01); H01J 37/3402 (2013.01); H01J 2237/022 (2013.01)

Citation (search report)

See references of WO 9914790A1

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

WO 9914790 A1 19990325; EP 1016120 A1 20000705; JP 2001516949 A 20011002; TW 503262 B 20020921; US 6023038 A 20000208

INPADOC legal status


2001-10-24 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20010403

2000-07-05 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000414

2000-07-05 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB