Global Patent Index - EP 1017873 A1

EP 1017873 A1 2000-07-12 - SINGLE BODY INJECTOR AND DEPOSITION CHAMBER

Title (en)

SINGLE BODY INJECTOR AND DEPOSITION CHAMBER

Title (de)

EINTEILIGES INJEKTIONSGERÄT UND ABSCHEIDUNGSKAMMER

Title (fr)

INJECTEUR MONOBLOC ET CHAMBRE POUR FORMATION DE DEPOTS

Publication

EP 1017873 A1 (EN)

Application

EP 98933329 A

Priority

  • US 9814393 W
  • US 89246997 A

Abstract (en)

[origin: WO9904059A1] The injector (105) comprises a member with a gas delivery surface (114), passage(s) (117) formed therein for receiving a gas, and distribution channel(s) (118) which extend between the passage(s) (117) and the gas delivery surface. The gas delivery surface (114) contains rounded side regions and a center recessed region. The injector may include a second passage (156) and a distribution channel (157), which extends between the second passage (156) and a rounded side region of the gas delivery surface (114), formed therein for delivering an etchant species. The deposition chamber (155) includes at least one injector (105); a plurality of vent blocks (106); and a support (122) positioned beneath the injector (105) and vent blocks (106), creating a deposition region (124) therebetween. The vent blocks (106) are positioned adjacent one on each side of the injector (105), and spaced from the injector (105) to define exhaust channels (107) therebetween.

IPC 1-7 (main, further and additional classification)

C23C 16/00; C03B 19/14; C23C 16/44

IPC 8 full level (invention and additional information)

C03C 17/00 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); H01L 21/205 (2006.01); H01L 21/3065 (2006.01); H01L 21/31 (2006.01)

CPC (invention and additional information)

C23C 16/45572 (2013.01); C03C 17/002 (2013.01); C23C 16/4405 (2013.01); C23C 16/4412 (2013.01); C23C 16/455 (2013.01); C23C 16/45514 (2013.01); C23C 16/45519 (2013.01); C23C 16/45595 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9904059 A1 19990128; AT 472615 T 20100715; AU 8299398 A 19990210; CN 1122116 C 20030924; CN 1265163 A 20000830; DE 69841749 D1 20100812; EP 1017873 A1 20000712; EP 1017873 A4 20040825; EP 1017873 B1 20100630; EP 1889817 A2 20080220; EP 1889817 A3 20080227; EP 1889817 B1 20130612; JP 2001510242 A 20010731; JP 2004235660 A 20040819; JP 3607198 B2 20050105; JP 4216212 B2 20090128; TW 412597 B 20001121; US 6022414 A 20000208

INPADOC legal status


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