EP 1018158 A1 20000712 - MOISTURE PROOFING FOR BORATE GLASS SEMICONDUCTOR PASSIVATION LAYERS
Title (en)
MOISTURE PROOFING FOR BORATE GLASS SEMICONDUCTOR PASSIVATION LAYERS
Title (de)
FEUCHTIGKEITSSCHUTZ FÜR BORATGLASHALBLEITERPASSIVIERUNGSSCHICHTEN
Title (fr)
PROTECTION CONTRE L'HUMIDITE POUR COUCHES DE PASSIVATION AU VERRE AU BORATE POUR SEMI-CONDUCTEURS
Publication
Application
Priority
- DE 9802613 W 19980903
- DE 19738547 A 19970903
Abstract (en)
[origin: WO9912201A1] According to the invention, a hydrophobic polymeric coating is used in the production of moisture proofing for zinc borate glass layers. The hydrophobic polymeric coating can consist of either benzocyclobutene or polyparylene.
IPC 1-7
IPC 8 full level
H01L 21/312 (2006.01); H01L 23/29 (2006.01); H01L 23/31 (2006.01)
CPC (source: EP)
H01L 23/293 (2013.01); H01L 23/3171 (2013.01); H01L 2924/0002 (2013.01)
Citation (search report)
See references of WO 9912201A1
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 9912201 A1 19990311; EP 1018158 A1 20000712; JP 2001515271 A 20010918; JP 3307918 B2 20020729
DOCDB simple family (application)
DE 9802613 W 19980903; EP 98952548 A 19980903; JP 2000509112 A 19980903