EP 1019736 A1 20000719 - MICROMACHINED ELEMENT AND METHOD OF FABRICATION THEREOF
Title (en)
MICROMACHINED ELEMENT AND METHOD OF FABRICATION THEREOF
Title (de)
MIKROMECHANISCHES ELEMENT UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
ELEMENT MICRO-USINE ET SON PROCEDE DE FABRICATION
Publication
Application
Priority
- US 9820849 W 19981002
- US 94262397 A 19971002
Abstract (en)
[origin: WO9918445A1] A micromachined element mounted to a substrate, the element including a cantilever having a proximal portion attached to the substrate and a coilable distal portion terminating in a free distal end. The coilable distal portion, upon being heated, is capable of bending away from the substrate and at least partially coiling upon itself to form a coiled portion. At least part of the micromachined element may be electrically conductive. In various embodiments, the micromachined element may function as a mechanical microspring, an electrically conductive link, and/or a magnetic coil. A method of fabricating the microelement may include the steps of selectively depositing various layers upon the substrate.
IPC 1-7
IPC 8 full level
G01R 1/067 (2006.01)
CPC (source: EP US)
G01R 1/06733 (2013.01 - EP US); G01R 1/06761 (2013.01 - EP US); G01R 1/06716 (2013.01 - EP US); Y10T 428/12493 (2015.01 - EP US); Y10T 428/125 (2015.01 - EP US); Y10T 428/12507 (2015.01 - EP US); Y10T 428/12528 (2015.01 - EP US); Y10T 428/24942 (2015.01 - EP US); Y10T 428/26 (2015.01 - EP US)
Citation (search report)
See references of WO 9918445A1
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
WO 9918445 A1 19990415; EP 1019736 A1 20000719; US 6245444 B1 20010612
DOCDB simple family (application)
US 9820849 W 19981002; EP 98950898 A 19981002; US 94262397 A 19971002