Global patent index - EP 1019965 A1

EP 1019965 A1 2000-07-19 - FIELD-EFFECT TRANSISTOR WITH HIGH PACKING DENSITY AND METHOD FOR THE PRODUCTION THEREOF

Title (en)

FIELD-EFFECT TRANSISTOR WITH HIGH PACKING DENSITY AND METHOD FOR THE PRODUCTION THEREOF

Title (de)

FELDEFFEKTTRANSISTOR HOHER PACKUNGSDICHTE UND VERFAHREN ZU SEINER HERSTELLUNG

Title (fr)

TRANSISTOR A EFFET DE CHAMP A DENSITE ELEVEE EN COMPOSANTS ET SON PROCEDE DE PRODUCTION

Publication

EP 1019965 A1 (DE)

Application

EP 98949904 A

Priority

  • DE 9802383 W
  • DE 19743342 A

Abstract (en)

[origin: DE19743342A1] The invention relates to a field-effect transistor with a semiconductor body (1) having a main surface and at least one source region (6) and one drain region (7) and fitted with a gate electrode (10) separated from a channel area between the source region (6) and the drain region (7) by an insulator layer (8). The source region (6), the drain region (7) and the channel area in the inventive field-effect transistor are arranged in the walls of the corresponding grooves (3, 4, 5) provided in the semiconductor body (1).

IPC 1-7 (main, further and additional classification)

H01L 29/423; H01L 21/336; H01L 29/10

IPC 8 full level (invention and additional information)

H01L 29/78 (2006.01); H01L 21/336 (2006.01); H01L 21/76 (2006.01); H01L 21/8242 (2006.01); H01L 27/108 (2006.01); H01L 27/12 (2006.01)

CPC (invention and additional information)

H01L 29/66636 (2013.01); H01L 27/10829 (2013.01); H01L 29/41766 (2013.01); H01L 29/4236 (2013.01); H01L 29/66621 (2013.01); H01L 29/66659 (2013.01); H01L 29/78 (2013.01); H01L 29/7834 (2013.01); H01L 29/7835 (2013.01); H01L 29/0623 (2013.01); H01L 29/0692 (2013.01); H01L 29/4238 (2013.01)

Citation (search report)

See references of WO 9917370A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

DE 19743342 A1 19990408; DE 19743342 C2 20020228; EP 1019965 A1 20000719; JP 2001518715 A 20011016; TW 402822 B 20000821; US 6384456 B1 20020507; WO 9917370 A1 19990408

INPADOC legal status

2003-12-17 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Effective date: 20031022

2000-07-19 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000317

2000-07-19 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT