EP 1021265 A4 20030827 - INTERMETALLIC ALUMINIDES AND SILICIDES SPUTTERING TARGETS, AND METHODS OF MAKING SAME
Title (en)
INTERMETALLIC ALUMINIDES AND SILICIDES SPUTTERING TARGETS, AND METHODS OF MAKING SAME
Title (de)
SPUTTERING TARGETS AUS INTERMETALLISCHEN ALUMINIDEN UND SILIZIDEN, SOWIE HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
CIBLES DE PULVERISATION CATHODIQUE D'ALUMINURES ET DE SILICIURES INTERMETALLIQUES, ET LEURS PROCEDES DE FABRICATION
Publication
Application
Priority
- US 9813719 W 19980701
- US 5226297 P 19970711
Abstract (en)
[origin: WO9902288A1] Described is an in situ method for producing articles of metal aluminide or silicide by reactive sintering and vacuum hot pressing powders and products, such as sputtering targets, produced.
IPC 1-7
IPC 8 full level
C22C 29/04 (2006.01); C23C 14/34 (2006.01)
CPC (source: EP)
C22C 29/04 (2013.01); C23C 14/3414 (2013.01); B22F 2999/00 (2013.01)
Citation (search report)
- [X] US 5618397 A 19970408 - KANO OSAMU [JP], et al
- [X] US 4663120 A 19870505 - PARENT EDWARD D [US], et al
- [X] PATENT ABSTRACTS OF JAPAN vol. 013, no. 388 (C - 630) 28 August 1989 (1989-08-28)
- [X] PATENT ABSTRACTS OF JAPAN vol. 013, no. 592 (C - 671) 26 December 1989 (1989-12-26)
- See references of WO 9902288A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9902288 A1 19990121; EP 1021265 A1 20000726; EP 1021265 A4 20030827; TW 398020 B 20000711
DOCDB simple family (application)
US 9813719 W 19980701; EP 98933058 A 19980701; TW 87111029 A 19980708