EP 1021588 A4 20021106 - FLUID DELIVERY APPARATUS AND METHOD
Title (en)
FLUID DELIVERY APPARATUS AND METHOD
Title (de)
ANLAGE UND VERFAHRENZUR FLÜSSIGKEITSZULIEFERUNG
Title (fr)
PROCEDE ET APPAREIL D'ADMINISTRATION DE FLUIDE
Publication
Application
Priority
- US 9814525 W 19980714
- US 5244297 P 19970714
Abstract (en)
[origin: WO9904060A1] A fluid delivery apparatus and method for metering and delivering a fluid to a downstream process. The fluid delivery apparatus includes a vessel (12) containing a fluid to be dispensed and a barrier member (16), wherein the barrier member (16) is translatable against the liquid (14). A method for metering and delivering a fluid to a downstream process includes confining the fluid in a vessel (12) having a barrier member (16) and selectively imposing a force on the barrier member (16) to cause the fluid to flow from the vessel (12).
IPC 1-7
IPC 8 full level
B01J 4/00 (2006.01); C23C 16/448 (2006.01)
CPC (source: EP)
B01J 4/001 (2013.01); C23C 16/448 (2013.01)
Citation (search report)
- [X] WO 9421840 A1 19940929 - ADVANCED TECH MATERIALS [US], et al
- [X] EP 0622475 A1 19941102 - APPLIED MATERIALS INC [US]
- [X] PATENT ABSTRACTS OF JAPAN vol. 014, no. 412 (C - 0755) 6 September 1990 (1990-09-06) & DATABASE WPI Derwent World Patents Index; AN 1990-228065
- See references of WO 9904060A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9904060 A1 19990128; AU 8401698 A 19990210; EP 1021588 A1 20000726; EP 1021588 A4 20021106
DOCDB simple family (application)
US 9814525 W 19980714; AU 8401698 A 19980714; EP 98934511 A 19980714