Global Patent Index - EP 1021825 A1

EP 1021825 A1 2000-07-26 - METHOD FOR MECHANOCHEMICAL POST-POLISH CLEANING OF AN OXIDE OR NITRIDE LAYER DEPOSITED ON A SUBSTRATE

Title (en)

METHOD FOR MECHANOCHEMICAL POST-POLISH CLEANING OF AN OXIDE OR NITRIDE LAYER DEPOSITED ON A SUBSTRATE

Title (de)

VERFAHREN ZUR REINIGUNG EINER OXYD- ODER NITRIDSCHICHT AUF EINEM SUBSTRAT NACH EINEM CHEMISCH-MECHANISCHEN POLIEREN

Title (fr)

PROCEDE DE NETTOYAGE POST-POLISSAGE MECANO-CHIMIQUE D'UNE COUCHE D'OXYDE OU DE NITRURE DEPOSEE SUR UN SUBSTRAT

Publication

EP 1021825 A1 (FR)

Application

EP 98947604 A

Priority

  • FR 9802125 W
  • FR 9712436 A

Abstract (en)

[origin: FR2769248A1] An oxide or nitride layer is subjected to post chemical-mechanical polishing (CMP) cleaning by spraying with an aqueous ammonia and hydrogen peroxide solution and then an aqueous hydrofluoric and hydrochloric acid solution to produce a low etched thickness. A post-CMP cleaning process for an oxide or nitride layer on a substrate comprising spraying the layer with an aqueous solution of ammonia and hydrogen peroxide (NH4OH : H2O2 : H2O) and then with an aqueous solution of hydrofluoric and hydrochloric acids (HF : HCl : H2O) to produce a total etched layer thickness of 4-6 nm.

IPC 1-7 (main, further and additional classification)

H01L 21/3105; H01L 21/306

IPC 8 full level (invention and additional information)

H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/3105 (2006.01)

CPC (invention and additional information)

H01L 21/02052 (2013.01); H01L 21/31053 (2013.01)

Citation (search report)

See references of WO 9918605A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

FR 2769248 A1 19990409; FR 2769248 B1 20000128; EP 1021825 A1 20000726; JP 2001519599 A 20011023; WO 9918605 A1 19990415

INPADOC legal status


2003-03-05 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20020606

2001-12-19 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: STMICROELECTRONICS S.A.

2001-12-19 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: COMMISSARIAT A L'ENERGIE ATOMIQUE

2001-12-19 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: FRANCE TELECOM

2000-07-26 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000316

2000-07-26 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT