Global Patent Index - EP 1025041 A1

EP 1025041 A1 2000-08-09 - METHOD FOR FABRICATING SILICON OXYNITRIDE

Title (en)

METHOD FOR FABRICATING SILICON OXYNITRIDE

Title (de)

VERFAHREN ZUR HERSTELLUNG VON SILIZIUMOXYNITRID

Title (fr)

PROCEDE DE FABRICATION D'OXYNITRURE DE SILICIUM

Publication

EP 1025041 A1 (EN)

Application

EP 98938414 A

Priority

  • US 9816358 W
  • US 5724197 P

Abstract (en)

[origin: WO9911573A1] A method for making silicon oxynitride comprising providing a vaporous gas stream of a compound selected from the group consisting of silazanes and siloxazanes. An enclosed, heated reaction site is also provided. The vaporous gas stream is delivered to the enclosed, heated reaction site in which the levels of oxygen are strictly controlled to promote the formation of silicon oxynitride particles.

IPC 1-7 (main, further and additional classification)

C01B 15/14; B05D 3/02; C04B 33/32; C04B 35/597

IPC 8 full level (invention and additional information)

C01B 21/082 (2006.01); C23C 16/30 (2006.01)

CPC (invention and additional information)

C01B 21/0823 (2013.01); C23C 16/308 (2013.01)

Citation (search report)

See references of WO 9911573A1

Designated contracting state (EPC)

DE FR GB IT NL

EPO simple patent family

WO 9911573 A1 19990311; AU 731687 B2 20010405; AU 8694298 A 19990322; BR 9811384 A 20000829; CA 2297329 A1 19990311; CN 1268099 A 20000927; EP 1025041 A1 20000809; ID 24748 A 20000803; JP 2001514151 A 20010911; TW 509660 B 20021111

INPADOC legal status


2002-01-02 [18W] WITHDRAWN

- Date of withdrawal: 20011106

2000-08-09 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000327

2000-08-09 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT NL