Global patent index - EP 1025409 A1

EP 1025409 A1 2000-08-09 - IMPROVED CHEMICAL DRYING AND CLEANING SYSTEM

Title (en)

IMPROVED CHEMICAL DRYING AND CLEANING SYSTEM

Title (de)

VERBESSERTES CHEMISCHES TROCKNUNGS- UND REINIGUNGSSYSTEM

Title (fr)

SYSTEME CHIMIQUE AMELIORE DE SECHAGE ET DE NETTOYAGE

Publication

EP 1025409 A1 (EN)

Application

EP 98948428 A

Priority

  • US 9819793 W
  • US 93567197 A
  • US 3436998 A
  • US 10946098 A

Abstract (en)

[origin: WO9915845A1] A system (11) for drying and/or cleaning a workpiece (17A), such as an electronic part, semiconductor wafer, printed circuit board or the like. As the workpiece is withdrawn from a processing or rinsing liquid (13), a selected drying and/or cleaning liquid, such as hydrofluoroether (HFE), an ethylated hydrofluoroether or an azeotrope of a hydrofluoroether or ethylated hydrofluoroether, that has a very small surface tension, is volatile, and has a density much greater than the processing liquid density, is sprayed on, dribbled on, or otherwise transferred to an exposed surface of the workpiece. The workpiece can be dried in 7-45 seconds, or less, in most situations and can be cleaned using the invention. Drying and/or cleaning can be performed in a single workpiece process, a single workpiece, continuous process, or a batch process.

IPC 1-7 (main, further and additional classification)

F26B 3/00

IPC 8 full level (invention and additional information)

F26B 5/00 (2006.01); F26B 9/06 (2006.01); F26B 21/14 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); H05K 3/26 (2006.01)

CPC (invention and additional information)

H01L 21/6704 (2013.01); H01L 21/67034 (2013.01); H05K 3/26 (2013.01)

Citation (search report)

See references of WO 9915845A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9915845 A1 19990401; CA 2303979 A1 19990401; CN 1125963 C 20031029; CN 1284159 A 20010214; EP 1025409 A1 20000809; JP 2001517864 A 20011009; JP 4299966 B2 20090722

INPADOC legal status

2004-09-08 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20030401

2003-12-03 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: L-TECH CORPORATION

- Ref Legal Event Code: RAP1

2003-02-05 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: L-TECH

- Ref Legal Event Code: RAP1

2000-08-09 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000413

2000-08-09 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE