Global Patent Index - EP 1027576 A1

EP 1027576 A1 2000-08-16 - METHOD AND APPARATUS FOR MODELING SUBSTRATE REFLECTIVITY DURING CHEMICAL MECHANICAL POLISHING

Title (en)

METHOD AND APPARATUS FOR MODELING SUBSTRATE REFLECTIVITY DURING CHEMICAL MECHANICAL POLISHING

Title (de)

VERFAHREN UND VORRICHTUNG ZUR MODELLIERUNG DER SUBSTRATREFLEKTIVITÄT WÄHREND DES CHEMISCH-MECHANISCHEN POLIERENS

Title (fr)

PROCEDE ET APPAREIL DE MODELISATION DE LA REFLECTIVITE DU SUBSTRAT LORS D'UNE OPERATION DE POLISSAGE CHIMICO-MECANIQUE

Publication

EP 1027576 A1 (EN)

Application

EP 98939950 A

Priority

  • US 9816902 W
  • US 96208597 A

Abstract (en)

[origin: WO9923449A1] A predicted in-situ reflectivity measurement (ISRM) trace is calculated for a substrate undergoing a chemical mechanical polishing. This predicted ISRM trace is an estimate of the measured reflectivity of the substrate as a function of time. During polishing, a laser interferometric detector is used to measure the reflectivity of the substrate and generate a measured ISRM trace. The measured trace is compared to the predicted trace, and the polishing process may be adjusted based on the comparison. For example, the predicted ISRM trace may be used to detect the polishing endpoint.

IPC 1-7 (main, further and additional classification)

G01B 11/06; H01L 21/66

IPC 8 full level (invention and additional information)

G01N 21/47 (2006.01); B24B 37/013 (2012.01); B24B 49/12 (2006.01); B24B 51/00 (2006.01); G01B 11/06 (2006.01); H01L 21/304 (2006.01); H01L 21/66 (2006.01)

CPC (invention and additional information)

B24B 37/013 (2013.01); B24B 49/12 (2013.01); B24B 51/00 (2013.01); G01B 11/0683 (2013.01); H01L 22/26 (2013.01)

Citation (search report)

See references of WO 9923449A1

Designated contracting state (EPC)

DE GB

EPO simple patent family

WO 9923449 A1 19990514; EP 1027576 A1 20000816; JP 2001522139 A 20011113; TW 374050 B 19991111

INPADOC legal status


2002-12-04 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20020301

2000-08-16 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000508

2000-08-16 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE GB