EP 1027727 A1 20000816 - DIAMOND-BASED MICROACTUATOR
Title (en)
DIAMOND-BASED MICROACTUATOR
Title (de)
MIKROAKTOR AUF DIAMANTBASIS
Title (fr)
MICRO-ACTIONNEUR A BASE DE DIAMANT
Publication
Application
Priority
- DE 9802956 W 19981001
- DE 19743798 A 19971002
- DE 19808326 A 19980227
Abstract (en)
[origin: WO9918606A1] The invention relates to a microactuator mounted on a thermally insulating layer (2) and comprising a resistance layer (4) of doped diamond. This resistance layer has an electric supply lead and electric end lead (9).
IPC 1-7
IPC 8 full level
B41J 2/05 (2006.01); B81B 1/00 (2006.01); H01L 21/02 (2006.01); H01L 21/822 (2006.01); H01L 27/04 (2006.01); F02M 63/00 (2006.01)
CPC (source: EP)
B81B 1/00 (2013.01); H01L 28/20 (2013.01); H01L 28/22 (2013.01); F02M 2200/21 (2013.01)
Citation (search report)
See references of WO 9918606A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9918606 A1 19990415; AU 1224099 A 19990427; EP 1027727 A1 20000816; JP 2001519259 A 20011023; JP 3831193 B2 20061011
DOCDB simple family (application)
DE 9802956 W 19981001; AU 1224099 A 19981001; EP 98955373 A 19981001; JP 2000515292 A 19981001