Global Patent Index - EP 1027727 A1

EP 1027727 A1 2000-08-16 - DIAMOND-BASED MICROACTUATOR

Title (en)

DIAMOND-BASED MICROACTUATOR

Title (de)

MIKROAKTOR AUF DIAMANTBASIS

Title (fr)

MICRO-ACTIONNEUR A BASE DE DIAMANT

Publication

EP 1027727 A1 (DE)

Application

EP 98955373 A

Priority

  • DE 9802956 W
  • DE 19743798 A
  • DE 19808326 A

Abstract (en)

[origin: WO9918606A1] The invention relates to a microactuator mounted on a thermally insulating layer (2) and comprising a resistance layer (4) of doped diamond. This resistance layer has an electric supply lead and electric end lead (9).

IPC 1-7 (main, further and additional classification)

H01L 21/3205

IPC 8 full level (invention and additional information)

B41J 2/05 (2006.01); B81B 1/00 (2006.01); H01L 21/02 (2006.01); H01L 21/822 (2006.01); H01L 27/04 (2006.01); F02M 63/00 (2006.01)

CPC (invention and additional information)

H01L 28/22 (2013.01); B81B 1/00 (2013.01); H01L 28/20 (2013.01); F02M 2200/21 (2013.01)

Citation (search report)

See references of WO 9918606A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9918606 A1 19990415; AU 1224099 A 19990427; EP 1027727 A1 20000816; JP 2001519259 A 20011023; JP 3831193 B2 20061011

INPADOC legal status


2009-12-09 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20090616

2001-04-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: HOFER, EBERHARD, P.

2001-04-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: KOHN, ERHARD

2001-04-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: REMBE, CHRISTIAN

2001-04-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: AUS DER WIESCHE, STEFAN

2001-04-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: GLUCHE, PETER

2001-04-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: LEUNER, RUEDIGER

2001-01-03 [RIN1] INVENTOR (CORRECTION)

- Inventor name: HOFER, EBERHARD, P.

2001-01-03 [RIN1] INVENTOR (CORRECTION)

- Inventor name: KOHN, ERHARD

2001-01-03 [RIN1] INVENTOR (CORRECTION)

- Inventor name: REMBE, CHRISTIAN

2001-01-03 [RIN1] INVENTOR (CORRECTION)

- Inventor name: AUS DER WIESCHE, STEFAN

2001-01-03 [RIN1] INVENTOR (CORRECTION)

- Inventor name: GLUCHE, PETER

2001-01-03 [RIN1] INVENTOR (CORRECTION)

- Inventor name: LEUNER, RUEDIGER

2000-08-16 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000413

2000-08-16 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE