EP 1029338 A1 20000823 - METHOD FOR MAKING AN ELECTRON SOURCE WITH MICROTIPS
Title (en)
METHOD FOR MAKING AN ELECTRON SOURCE WITH MICROTIPS
Title (de)
VEFAHREN ZUR HERSTELLUNG EINER MIKROSPITZEN-ELEKTRONENQUELLE
Title (fr)
PROCEDE DE FABRICATION D'UNE SOURCE D'ELECTRONS A MICROPOINTES
Publication
Application
Priority
- FR 9802337 W 19981102
- FR 9713794 A 19971103
Abstract (en)
[origin: FR2770683A1] The invention concerns a method which consists in making a structure comprising a substrate (10), at least one cathode conductor (12), a first insulating layer (14), a grid layer (16) and a second insulating layer (71). It consists in forming holes through the insulating layers and the grid layer, in forming a deposit (80) of a material emitting electrons in the holes up to the upper level thereof, treating this deposit to minimise or prevent a chemical etching from the top thereof, eliminating the second insulating layer and carrying out a chemical etching of the material to obtain the microtips. The invention is useful for making flat screens.
IPC 1-7
IPC 8 full level
H01J 9/02 (2006.01)
CPC (source: EP)
H01J 9/025 (2013.01)
Citation (search report)
See references of WO 9923680A1
Designated contracting state (EPC)
DE GB IT
DOCDB simple family (publication)
FR 2770683 A1 19990507; FR 2770683 B1 19991126; EP 1029338 A1 20000823; JP 2001522126 A 20011113; WO 9923680 A1 19990514
DOCDB simple family (application)
FR 9713794 A 19971103; EP 98952833 A 19981102; FR 9802337 W 19981102; JP 2000519451 A 19981102