EP 1029600 A1 20000823 - CLEANING DEVICE
Title (en)
CLEANING DEVICE
Title (de)
REINIGUNGSVORRICHTUNG
Title (fr)
APPAREIL DE NETTOYAGE
Publication
Application
Priority
- JP 9901070 W 19990305
- JP 5931298 A 19980311
Abstract (en)
Disclosed is a cleaning apparatus having a very simple arrangement and capable of reliably removing the reaction product and the used fluid which have built up in a brush. A recessed section (2) having a size for permitting a brush to be located therein is formed to a main unit (4) having an open upper surface, and a chamber section (5) is formed so as to surround the recessed section (2). A plurality of nozzle sections (6) are formed to the main unit (4) between the chamber section (5) and the recessed section (2), whereas an introduction hole (7) communicating with the chamber section (5) and a discharge hole (3) communicating with the recessed section (2) are opened to the main unit (4), respectively. <IMAGE>
IPC 1-7
IPC 8 full level
A46B 17/06 (2006.01); B08B 3/02 (2006.01); B24B 53/017 (2012.01); B24B 55/06 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP)
A46B 17/06 (2013.01); B08B 1/52 (2024.01); B08B 3/02 (2013.01); B24B 55/06 (2013.01)
Designated contracting state (EPC)
FR NL
DOCDB simple family (publication)
WO 9946063 A1 19990916; DE 19980139 T1 20000316; EP 1029600 A1 20000823; GB 2338176 A 19991215; GB 9918867 D0 19991013; JP H11254293 A 19990921
DOCDB simple family (application)
JP 9901070 W 19990305; DE 19980139 T 19990305; EP 99939173 A 19990305; GB 9918867 A 19990305; JP 5931298 A 19980311