EP 1030062 A2 20000823 - Turbo-molecular pump
Title (en)
Turbo-molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
- JP 4103999 A 19990219
- JP 15621599 A 19990603
- JP 20099099 A 19990714
- US 47313799 A 19991228
Abstract (en)
A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump comprises: a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/02 (2006.01); F04D 29/00 (2006.01)
CPC (source: EP KR)
F04D 19/042 (2013.01 - EP); F04D 27/008 (2013.01 - EP); F04D 29/00 (2013.01 - KR); F04D 29/522 (2013.01 - EP); F04D 29/701 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1030062 A2 20000823; EP 1030062 A3 20020320; EP 1030062 B1 20071212; KR 100724048 B1 20070604; KR 20000058091 A 20000925
DOCDB simple family (application)
EP 00103326 A 20000221; KR 20000007703 A 20000218