Global Patent Index - EP 1031017 A1

EP 1031017 A1 2000-08-30 - MICROMECHANICAL DIFFERENTIAL PRESSURE SENSOR DEVICE

Title (en)

MICROMECHANICAL DIFFERENTIAL PRESSURE SENSOR DEVICE

Title (de)

MIKROMECHANISCHE DIFFERENZDRUCKSENSORVORRICHTUNG

Title (fr)

DISPOSITIF MICROMECANIQUE DE MESURE DE PRESSION DIFFERENTIELLE

Publication

EP 1031017 A1 (DE)

Application

EP 98962259 A

Priority

  • DE 9803346 W
  • DE 19750131 A

Abstract (en)

[origin: DE19750131A1] The invention relates to a micromechanical differential pressure sensor device for measuring a pressure difference between two interspaced areas or media in which two absolute pressure measuring devices (9a, 9b) are integrated in a monolithic manner on a single supporting substrate, especially on a semiconductor chip (1). The absolute pressure measuring devices (9a, 9b) are preferably produced by means of surface micromechanic technology.

IPC 1-7 (main, further and additional classification)

G01L 9/00; G01L 15/00

IPC 8 full level (invention and additional information)

G01L 13/00 (2006.01); G01L 9/00 (2006.01); G01L 9/12 (2006.01)

CPC (invention and additional information)

G01L 9/0073 (2013.01)

Citation (search report)

See references of WO 9926048A1

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

DE 19750131 A1 19990610; DE 19750131 C2 20020613; EP 1031017 A1 20000830; JP 2001523814 A 20011127; KR 20010032103 A 20010416; US 6725725 B1 20040427; WO 9926048 A1 19990527

INPADOC legal status


2003-10-22 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20030423

2000-08-30 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000417

2000-08-30 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB