EP 1031017 A1 20000830 - MICROMECHANICAL DIFFERENTIAL PRESSURE SENSOR DEVICE
Title (en)
MICROMECHANICAL DIFFERENTIAL PRESSURE SENSOR DEVICE
Title (de)
MIKROMECHANISCHE DIFFERENZDRUCKSENSORVORRICHTUNG
Title (fr)
DISPOSITIF MICROMECANIQUE DE MESURE DE PRESSION DIFFERENTIELLE
Publication
Application
Priority
- DE 9803346 W 19981113
- DE 19750131 A 19971113
Abstract (en)
[origin: DE19750131A1] The invention relates to a micromechanical differential pressure sensor device for measuring a pressure difference between two interspaced areas or media in which two absolute pressure measuring devices (9a, 9b) are integrated in a monolithic manner on a single supporting substrate, especially on a semiconductor chip (1). The absolute pressure measuring devices (9a, 9b) are preferably produced by means of surface micromechanic technology.
IPC 1-7
IPC 8 full level
G01L 9/00 (2006.01); G01L 9/12 (2006.01); G01L 13/00 (2006.01)
CPC (source: EP KR US)
G01L 9/00 (2013.01 - KR); G01L 9/0073 (2013.01 - EP US)
Citation (search report)
See references of WO 9926048A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DE 19750131 A1 19990610; DE 19750131 C2 20020613; EP 1031017 A1 20000830; JP 2001523814 A 20011127; KR 20010032103 A 20010416; US 6725725 B1 20040427; WO 9926048 A1 19990527
DOCDB simple family (application)
DE 19750131 A 19971113; DE 9803346 W 19981113; EP 98962259 A 19981113; JP 2000521365 A 19981113; KR 20007005236 A 20000513; US 57148900 A 20000515