EP 1032012 A2 20000830 - Electron-emitting device, electron source, and manufacture method for image-forming apparatus
Title (en)
Electron-emitting device, electron source, and manufacture method for image-forming apparatus
Title (de)
Elektronen emittierende Einrichtung,Elektronenquelle und Verfahren zur Herstellung eines Bilderzeugungsgerätes
Title (fr)
Dispositif émetteur d'électrons,source d'électrons et procédé de fabrication d'un appareil de formation d'images
Publication
Application
Priority
- JP 4921899 A 19990225
- JP 5149799 A 19990226
Abstract (en)
A method of manufacturing an electron-emitting device has a step of forming a pair of conductors on a substrate, the conductors being spaced from each other, and an activation process of depositing carbon or carbon compound on at least one side of the pair of conductors in an atmosphere of carbon compound gas. The activation process includes a plurality of processes of two or more stages including a first process and a second process. The first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial of the second process used as a last activation process. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 9/02 (2006.01)
CPC (source: EP)
H01J 9/027 (2013.01)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 1032012 A2 20000830; EP 1032012 A3 20020123; EP 1032012 B1 20090325; DE 60041845 D1 20090507
DOCDB simple family (application)
EP 00301465 A 20000224; DE 60041845 T 20000224